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Tarancon A.,National Institute of Microelectronics | Sabate N.,National Institute of Microelectronics | Cavallaro A.,Research Center in Nanoscience and Nanotechnology | Gracia I.,National Institute of Microelectronics | And 6 more authors.
Journal of Nanoscience and Nanotechnology | Year: 2010

The present study is devoted to analyze the compatibility of yttria-stabilized zirconia thin films prepared by pulsed laser deposition and metalorganic chemical vapor deposition techniques, with microfabrication processes based on silicon technologies for micro solid oxide fuel cells applications. Deposition of yttria-stabilized zirconia on Si/SiO 2/Si 3N 4 substrates was optimized for both techniques in order to obtain high density and homogeneity, as well as a good crystallinity for film thicknesses ranging from 60 to 240 nm. In addition, stabilized zirconia free-standing membranes were fabricated from the deposited films with surface areas between 50 × 50 μm 2 and 820 × 820 μm 2. Particular emphasis was made on the analysis of the effect of the nature of the deposition technique and the different design and fabrication parameters (membrane area, thickness and substrate deposition temperature) on the residual stress of the membranes in order to control their thermomechanical stability for application as electrolyte in micro solid oxide fuel cells. Copyright © 2010 American Scientific Publishers. All rights reserved. Source


Garbayo I.,National Institute of Microelectronics | Tarancon A.,National Institute of Microelectronics | Tarancon A.,Catalonia Institute for Energy Research IREC | Santiso J.,Research Center in Nanoscience and Nanotechnology | And 4 more authors.
Materials Research Society Symposium Proceedings | Year: 2010

The present work is devoted to study the development of yttria-stabilized zirconia membranes self-supported on silicon-based microplatforms, to be used as electrolytes on micro solid oxide fuel cells. The microfabrication process to obtain yttria-stabilized zirconia membranes is detailed, and some key aspects for the integration of yttria-stabilized zirconia films deposited by pulsed laser deposition on the silicon-based microplatform are shown. Moreover, the effect on the thermomechanical stability of different fabrication parameters is presented, as well as the way to control the pinhole generation on the membranes. Finally, some electrical characterization guidelines are included, in order to study the effects of the platform and the membrane dimensions on the different measurements performed. © 2010 Materials Research Society. Source


Garbayo I.,National Institute of Microelectronics | Tarancon A.,National Institute of Microelectronics | Tarancon A.,Catalonia Institute for Energy Research IREC | Santiso J.,Research Center in Nanoscience and Nanotechnology | And 6 more authors.
Solid State Ionics | Year: 2010

Yttria-stabilized zirconia free-standing membranes were fabricated by pulsed laser deposition on Si/SiO2/Si3N4 structures for developing silicon-based micro devices for micro solid oxide fuel cell applications. Their mechanical stability under working conditions was evaluated satisfactorily by applying thermal cycling to the membranes. Membranes mechanically stable at operating temperatures as high as 700 °C were obtained for deposition temperatures in the range between 400 and 700 °C. Thermomechanical behavior as measured by X-ray microdiffraction was correlated with the evolution of the microstructure with the temperature from TEM analysis, comparing as-deposited and post-deposition annealed membranes. Electrical properties of both yttria-stabilized zirconia films and membranes were studied by DC conductivity and impedance spectroscopy, respectively. A difference of almost one order of magnitude was measured between bulk and stressed films while conductivities close to the bulk were observed for YSZ membranes. Values of area specific resistance of 0.15 Ωcm2 were measured at temperatures below 450 °C for 240 nm thick YSZ membranes deposited at 600 °C and annealed at the same temperature for 2.5 h. © 2010 Elsevier B.V. All rights reserved. Source

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