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Ohkita M.,SOM Japan Inc. | Tokutaka H.,SOM Japan Inc. | Yoshihara K.,Omicron Nano Technology Inc. | Oyabu M.,Kanazawa Institute of Technology
Advances in Intelligent Systems and Computing | Year: 2014

A chemical spectral data set was analyzed with the PCA method and the SSOM method. The results are in agreement albeit that the PCA method is only valid when the number of spectral dimensionalities is small. This is not the case with the SSOM method. In the present paper, the data of the AES depth profile, where Sn was plated on Cu, and which has a high dimensionality, is also analyzed. These results show the excellence of the SSOM method. © Springer International Publishing Switzerland 2014.

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