Nano Metrology and Control Laboratory

of Engineering, Japan

Nano Metrology and Control Laboratory

of Engineering, Japan

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Osawa S.,Nano Metrology and Control Laboratory | Shimizu Y.,Nano Metrology and Control Laboratory | Gao W.,Nano Metrology and Control Laboratory | Fukuda T.,Ryotec Corporation | And 2 more authors.
Proceedings of the 6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011 | Year: 2011

This paper presents a high speed and a high accurate measurement method for the height of the cutting edge of a rotary cutting tool with respect to the reference surface on the tool by using a laser displacement sensor. In this method, the height of the cutting edge is obtained from the output of the optical displacement sensor when the intensity output reaches the maximum. Both simulation and experimental results confirmed that the proposed method enables us to measure the height of cutting edge, the width of which is smaller than that of the laser spot.


Ito S.,Nano Metrology and Control Laboratory | Aihara R.,Nano Metrology and Control Laboratory | Kim W.J.,Nano Metrology and Control Laboratory | Shimizu Y.,Nano Metrology and Control Laboratory | Gao W.,Nano Metrology and Control Laboratory
Advanced Optical Technologies | Year: 2014

Three-axis vibration measurement of the linear air-bearing stage demonstrated by utilizing the method of the multi-axis laser interferometer is discussed. In order to detect the X-Y-Z directional vibration of the positioning stage table simultaneously, two-dimensional XY gratings are utilized as the scale grating and the reference grating of the interferometer. The X- and Y-directional positive and negative first-order diffracted beams are superimposed to generate the interference signals on the photodetectors. When the multi-axis vibration is applied to the scale grating, the intensities of the interference signals in X- and Y-directions varied corresponding to the vibration of the scale grating. Consequently, three-axis vibrations of the scale grating can be calculated by processing the X- and Y-directional positive and negative first-order interference signals. In this paper, a three-axis vibrometer based on the grating-interferometer has been developed for measurement of the positioning stage table vibration. The detection method of the vibration based on the Doppler frequency shift has been demonstrated. As an application of the multi-axis grating-interferometric vibrometer, multi-axis vibrations of the linear air-bearing stage are measured by using the developed vibrometer. Copyright © 2014 THOSS Media and De Gruyter.


Lu W.,Nano Metrology and Control Laboratory | Yuki S.,Nano Metrology and Control Laboratory | Wei G.,Nano Metrology and Control Laboratory
Advanced Materials Research | Year: 2012

A thermal-type contact sensor was proposed to detect small defects, the heights of which are less than 16 nm, on the wafer surface. The feasibility of the contact sensor, which detects frictional heat generated at the contact, was theoretically investigated focusing on the temperature rise of the sensor element. Simulation results with both the simple model of heat transfer and the FEM model showed that the expected temperature rise of the contact sensor is enough to be detected by the conventional electric circuit. © (2012) Trans Tech Publications.


Asai T.,Nano Metrology and Control Laboratory | Jang S.H.,Nano Metrology and Control Laboratory | Arai Y.,Nano Metrology and Control Laboratory | Gao W.,Nano Metrology and Control Laboratory
Proceedings of SPIE - The International Society for Optical Engineering | Year: 2010

Single crystal diamond micro-cutting tools, which are used for fabrication of precision micro-parts, have very sharp tool edges with radii in the range of tens of nanometers or even nanometers. Although there are many types of tools, the tools with a rounded nose are treated in this paper. They can be used for fabrication of very smooth and accurate surface with 3D micro structures such as micro-lens arrays, diffractive optical elements and so on. The machined quality is highly depending on the tool edges' states and it is desired to manage them. This paper presents a measuring instrument based on atomic force microscope (AFM), which is designed and constructed for on-machine measurement of the cutting edge profile. It is a combination of an AFM probe unit for 3D edge profile measurement and an alignment system with an optical sensor for aligning the probe-tip with the tool's edge top so that the measurement can be carried out in a short time. Measurement experiments of micro-tools with (nominal) nose radii of 8 μm and 0.2 mm are summarized to show the performance of the instrument. And the nose radii were evaluated as 7.2 μm and 0.188 mm, respectively. © 2010 SPIE.

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