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Austin, TX, United States

Patent
Canon Inc. and Molecular Imprints, Inc. | Date: 2015-02-27

Imprint lithography templates having alignment marks with highly absorptive material. The alignment marks are insensitive to the effects of liquid spreading and can provide stability and increase contrast to alignment system during liquid imprint filling of template features.


Patent
Canon Inc. and Molecular Imprints, Inc. | Date: 2015-01-26

Systems for controlling velocity of a contact line and height profile between a template and a substrate during imprinting of polymerizable material are described.


Patent
Canon Inc. and Molecular Imprints, Inc. | Date: 2015-10-26

Methods and systems are provided for fabricating polymer-based imprint lithography templates having thin metallic or oxide coated patterning surfaces. Such templates show enhanced fluid spreading and filling (even in absence of purging gases), good release properties, and longevity of use. Methods and systems for fabricating oxide coated versions, in particular, can be performed under atmospheric pressure conditions, allowing for lower cost processing and enhanced throughput.


Patent
Molecular Imprints, Inc. | Date: 2014-03-17

Methods and systems are provided for fabricating polymer-based imprint lithography templates having thin metallic or oxide coated patterning surfaces. Such templates show enhanced fluid spreading and filling (even in absence of purging gases), good release properties, and longevity of use. Methods and systems for fabricating oxide coated versions, in particular, can be performed under atmospheric pressure conditions, allowing for lower cost processing and enhanced throughput.


Patent
Canon Inc. and Molecular Imprints, Inc. | Date: 2015-02-26

Control of lateral strain and lateral strain ratio (d

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