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Gifu-shi, Japan

Ito S.,Tohoku University | Sekine S.,Tohoku University | Shimizu Y.,Tohoku University | Gao W.,Tohoku University | And 3 more authors.
International Journal of Automation Technology | Year: 2013

This paper introduces the widthmeasurement of a cutting tool edge by utilizing a laser triangulation displacement sensor. By using the reflected light intensity of the laser displacement sensor, micrometric edge width which is smaller than the diameter of the laser beam spot can be measured. With regard to the quantitative evaluation of the laser spot diameter, a calibration method of the laser spot diameter is achieved by using the pin-gauges. The diameter of the laser spot is obtained by using the pin-gauges, and the relationship between the reflected light intensity and the diameter of the pin-gauges are investigated. The width of the cutting tool edge is measured by the calibrated laser spot diameter, and then the reproducibility is evaluated.


Osawa S.,Tohoku University | Ito S.,Tohoku University | Shimizu Y.,Tohoku University | Jang S.,Tohoku University | And 4 more authors.
Journal of Advanced Mechanical Design, Systems and Manufacturing | Year: 2012

This paper proposed a high speed and a high accuracy measurement method for the cutting edge height of a rotary cutting tool with respect to the reference surface on the tool by using a laser triangulation displacement sensor. In the measurement, not only the displacement output but also the light intensity output of the laser displacement sensor, which corresponds to the intensities of the laser beam reflected from the cutting tool surface, are acquired when the laser displacement sensor scans across the cutting edge. To remove the influence of the width of the cutting edge, the cutting edge height is determined from the sensor displacement output when the sensor light intensity output reaches to the maximum. It has been confirmed by theoretical analysis, computer simulation and experiment that the proposed method is effective even when the width of the cutting edge is smaller than the diameter of the laser spot of the sensor. © 2012 by JSME.


Ito S.,Tohoku University | Kikuchi H.,Tohoku University | Chen Y.,Tohoku University | Shimizu Y.,Tohoku University | And 5 more authors.
Applied Sciences (Switzerland) | Year: 2016

This paper presents a micro-coordinate measuring machine (micro-CMM) for large-scale dimensional measurement of a micro-slit on a precision die coater by using a shear-mode micro-probe. A glass micro sphere with a nominal diameter of 52.3 μm was attached on one end of a tapered glass capillary tube as a probe tip ball. The micro-slit width of a slot die coater with a nominal slit width of 85 μm was measured by the micro-CMM. The probe tip was placed in the slit for the measurement. The effective working length of the probe was confirmed experimentally to be at least 1 mm. In order to measure the gap width uniformity over the entire slot die length of 200 mm, an air-bearing linear slide with a travelling stroke of 300 mm was employed in the micro-CMM to position the probe along the length direction of the slot die. The angular alignment error and the motion error of the air-bearing linear slide as well as those of the stages for positioning the probe along the direction perpendicular to the length direction of the slot die were investigated for evaluation of the expanded uncertainty of gap width measurement. © 2016 by the authors.


Ito S.,Tohoku University | Chen Y.-L.,Tohoku University | Shimizu Y.,Tohoku University | Kikuchi H.,Tohoku University | And 5 more authors.
Precision Engineering | Year: 2016

A shear mode micro-probing system was constructed for gap measurement of a precision slot die coater with a nominal gap width of 90 μm and a length of 200 mm. A glass micro-stylus with a nominal tip ball diameter of 52.6 μm was oscillated by a tuning fork quartz crystal resonator with its oscillation direction parallel to the measurement surfaces. An on-line qualification setup was established to compensate for the influences of the uncertainty sources, including the water layers on the measurement surfaces. The measurement uncertainty of the measured gap width was estimated to be less than 100 nm. © 2015 Elsevier Inc. All rights reserved.

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