Mitutoyo Corporation

Kanagawa ken, Japan

Mitutoyo Corporation

Kanagawa ken, Japan

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Patent
Mitutoyo Corporation | Date: 2016-11-16

An interference objective lens includes: an objective lens configured to converge a light to be emitted from a light source toward a measurement target; a reference surface unit having a reference surface; and a beam splitter configured to split the light having passed through the objective lens into a reference optical path facing toward the reference surface and a measurement optical path facing toward the measurement target, to synthesize a reflected light from the reference surface and a reflected light from the measurement target, and to output the same as an interference light, wherein the reference surface unit is configured to be replaceable.


Patent
Mitutoyo Corporation | Date: 2017-02-02

A measuring probe includes a stylus having a contact part, an axial motion mechanism, and a rotary motion mechanism. The axial motion mechanism includes first diaphragm structures and a moving member that allows the contact part to move in an axial direction. The rotary motion mechanism includes a second diaphragm structure and a rotating member that allows the contact part to move along a plane perpendicular to the axial direction. The first diaphragm structures are disposed at a symmetric distance with respect to the second diaphragm structure, and the second diaphragm structure is disposed between the first diaphragm structures in the axial direction. The axial motion mechanism supports the rotary motion mechanism, or the rotary motion mechanism supports the axial motion mechanism.


Patent
Mitutoyo Corporation | Date: 2017-06-21

A scanning probe responsive in three axes is provided for use with a coordinate measuring machine. The scanning probe utilizes multiplexing techniques for producing X, Y and Z position signals. The X and Y position signals are indicative of a rotation of a stylus coupling portion about a rotation center, and the Z position signal is indicative of the position of the stylus coupling portion along the axial direction. The Z position signal is substantially insensitive to motion of the axial detection deflector in at least one direction that is transverse to the axial direction. The X, Y and Z position signals may be processed to determine a 3D position of a contact portion of the stylus, which may include utilizing the Z position signal in combination with known trigonometry of the scanning probe to remove axial motion cross coupling components from the X and Y position signals.


Patent
Mitutoyo Corporation | Date: 2017-06-21

A scanning probe is provided for use with a coordinate measuring machine. The scanning probe includes a rotary position detection configuration which outputs X and Y position signals indicative of a rotation of a stylus coupling portion about a rotation center, and an axial position detection configuration which outputs a Z position signal indicative of the position of the stylus coupling portion along the axial direction. The Z position signal is substantially insensitive to motion of the axial detection deflector in at least one direction that is transverse to the axial direction. The X, Y and Z position signals may be processed to determine a 3D position of a contact portion of the stylus, which may include utilizing the Z position signal in combination with known trigonometry of the scanning probe to remove axial motion cross coupling components from the X and Y position signals.


Patent
Mitutoyo Corporation | Date: 2017-07-12

A measurement target (10) comprising a plurality of measurement sections (S11, S12, S13) and a reference gauge (20) comprising a plurality of reference sections (S21, S22, S23) are placed in parallel in an inside of a temperature-controlled chamber (30). At first and second interior temperatures of the temperature-controlled chamber (30), first and second relative measurements of the lengths (D11, D12, D13) of the measurement sections (S11, S12, S13) are performed, based on the lengths (D21, D22, D23) of the corresponding reference sections. A CTE is calculated for each of the measurement sections.


Patent
Mitutoyo Corporation | Date: 2017-07-12

A measurement target (10) having a measurement target section and a reference gauge (20E, 20F) having a known reference gauge length (Dr) that is shorter than the length (Dt) of the measurement target section are placed in parallel in an inside of a temperature-controlled chamber (30). Relative measurement sections (M1, M2, M3) are allocated to the measurement target section, each having a length corresponding to the reference gauge length (Dr) and each being shifted by a predetermined shift amount (Dd). At first and second interior temperatures of the temperature-controlled chamber (30), first (Dt11, Dt21, Dt31) and second (Dt12, Dt22, Dt32) relative measurements of the length are performed for each measurement section (M1, M2, M3) with reference to the reference gauge (20E, 20F). A CTE of the measurement target section is calculated based on the CTEs of the relative measurement sections.


A probe head of a three-dimensional coordinate measuring device according to an embodiment of the present invention includes a measurer, a first and second diaphragm, a first oscillator, and a second oscillator. The measurer extends in a first direction. The first and second diaphragms are provided at two different positions on the measurer, at a first position and a second position, respectively, and support the measurer such that the measurer is capable of displacement in a first direction. The first oscillator causes the measurer to oscillate along the first direction. The second oscillator causes a predetermined portion of the measurer between the first and second diaphragms to oscillate along each of a second direction orthogonal to the first direction, and a third direction orthogonal to both the first and second directions.


Patent
Mitutoyo Corporation | Date: 2017-01-27

Provided is a chromatic confocal sensor including: a first light source that emits measurement light including a plurality of light beams having different wavelengths; a second light source that emits a visible light beam having a predetermined wavelength; an optical head that causes incident light to be converged at a focal position corresponding to a wavelength of the incident light and outputs reflection light reflected by an object to be measured at the focal position; a position calculation section that calculates a position of the object to be measured on the basis of the reflection light output by the optical head; and a switching section that selectively switches between a first operation in which only the measurement light enters the optical head and a second operation in which at least the visible light beam enters the optical head.


Patent
Mitutoyo Corporation | Date: 2017-01-27

The photoelectric encoder 1 includes a scale 2, and a detection head 3 including a light emitting unit 4, an index 5, and a detection unit 6. The index 5 includes a first index portion 50 consisting of diffraction portions and non-diffraction portions alternately juxtaposed at a predetermined pitch along the longitudinal direction of the scale 2, and a second index portion 51 consisting of diffraction portions and non-diffraction portions alternately juxtaposed at twice the pitch of the first index portion 50. The scale 2 is configured to include a first pattern portion 20 consisting of diffraction portions and non-diffraction portions alternately juxtaposed at a predetermined pitch along the longitudinal direction of the scale 2, and a second pattern portion 21 consisting of diffraction portions and non-diffraction portions arranged in a checkered pattern.


Patent
Mitutoyo Corporation | Date: 2017-02-03

An image measuring device includes an image capturer capturing an image of a work piece, a displacer relatively displacing the work piece and the image capturer, a position acquirer obtaining a position where the image is captured by the image capturer, a controller controlling the image capturer to capture partial images of the work piece while displacing the image capturer relative to the work piece at a fixed speed using the displacer, a total image former forming a total image of the work piece by pasting together a plurality of partial images captured by the image capturer based on position data obtained by the position acquirer, and a light source integrally displacing with the image capturer relative to the work piece and emitting light at a portion of the work piece captured by the image capturer.

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