Mitutoyo Corporation

Kanagawa ken, Japan

Mitutoyo Corporation

Kanagawa ken, Japan
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Patent
Mitutoyo Corporation | Date: 2016-11-16

An interference objective lens includes: an objective lens configured to converge a light to be emitted from a light source toward a measurement target; a reference surface unit having a reference surface; and a beam splitter configured to split the light having passed through the objective lens into a reference optical path facing toward the reference surface and a measurement optical path facing toward the measurement target, to synthesize a reflected light from the reference surface and a reflected light from the measurement target, and to output the same as an interference light, wherein the reference surface unit is configured to be replaceable.


Patent
Mitutoyo Corporation | Date: 2017-02-01

A displacement detecting device includes a scale diffraction grating (210) and a detecting head unit (300). The detecting head unit (300) includes a light source (320), a first retroreflecting unit (350) that retroreflectes positive first-order diffracted light of light diffracted by the scale diffraction grating, such that the retroreflected light enters the scale diffraction grating again, a second retroreflecting unit (360) that retroreflectes negative first-order diffracted light of the light diffracted by the scale diffraction grating, such that the retroreflected light enters the scale diffraction grating (210) again, and a light receiving unit (380) that receives an interference signal. Each of the first retroreflecting unit (350) and the second retroreflecting unit (360) has a deflecting function of deflecting light incident on the corresponding retroreflecting unit by a predetermined angle and then emitting the light.


Patent
Mitutoyo Corporation | Date: 2017-02-01

A displacement detecting device (100) includes a main scale (110) and a detecting head unit (130). The detecting head unit (130) includes a light source, a light receiving unit (132), and an index scale group (140) that is disposed in the middle of a light path from the main scale (110) to the light receiving unit (132). The index scale group (140) includes two or more index scales including diffraction gratings, respectively. A positive s-th order diffracted light and a negative s-th order diffracted light of diffracted lights from the main scale are used as the signal lights. The displacement detecting device satisfies a first condition and a second condition, the first condition being expressed as follows: (u1 - u2) (mN g) = 2 sin, the second condition being expressed as follows:


A method for measuring a height map of multiple fields of view on a surface of a substrate with an optical profilometer and combining them to a composite height map, the method comprises:moving the profilometer relative to the surface from field to field along a route;measuring height maps of fields on the surface along the route with the profilometer; and,combining a plurality of height maps of measured fields by normalizing said height maps to each other to produce a composite height map of the surface; wherein the route is configured to minimize sensitivity to height drifting of the profilometer during combining a plurality of the height maps.


A measuring instrument comprising a display (50) on which measurements are displayed, whereinthe display (50) is provided by an organic electroluminescent display device (50A) comprising an assembly of organic electroluminescence devices or an electronic paper,the display (50) is a dot-matrix type in which display elements are arranged in a matrix,the display (50) is provided with a scale-segment image display area (82) that displays a plurality of scale-segment images arranged in a circle and a reversed image display area (83) that reversely displays the scale segment image corresponding to an angular area in accordance with the measurements, andthe measuring instrument is provided with a scale-interval switch (60) that switches an interval between the scale segment images in accordance with a display resolution.


Patent
Mitutoyo Corporation | Date: 2017-03-15

A scale (1) includes a grating pattern (4) arranged in a measurement direction. A detection head (2) can be moved relative to the scale in the measurement direction and outputs an electric signal indicating a result of detection of the pattern. An operation unit (3) calculates a relative displacement of the detection head relative to the scale. The detection head (2) irradiates the scale with light. A light-receiving unit (12) includes a light-receiving element array arranged in the measurement direction and outputs a result of detection of the irradiation light applied to the light-receiving element array as the electric signal. An optical system (11) forms light from the scale into interference fringes on a light-receiving surface of the light-receiving unit by using lens arrays arranged in the measurement direction. A lens array pitch between neighboring lenses of the lens arrays is not equal to an integral multiple of a pitch of the grating pattern.


Patent
Mitutoyo Corporation | Date: 2017-03-01

A probe head rotation mechanism, situated between a spindle and a probe of a coordinate measurement device, includes: a main body frame supported by the spindle; a rotor supported by the main body frame so as to be capable of tilting with respect to an axial center of the spindle; and a motor supported by the main body frame and driving the rotor. A motor main body is arranged away from lying on the axial center of the spindle, and an axial center of the motor is oriented outward in a diameter direction of the spindle.


Patent
Mitutoyo Corporation | Date: 2017-01-18

Motor control device includes a controller controlling a motor (a calculator controller and an electric current controller), and a detector (an electric current loop) detecting an electric current of the motor and returning the detected electric current to the controller. The electric current loop includes a first detection system, a second detection system, and an electric current calculator which sums output signals from each system. Each detection system includes a sensor detecting the electric current of the motor, and a weight adjuster outputting to the electric current calculator, a detection electric current value from each sensor multiplied by a weight coefficient.


Patent
Mitutoyo Corporation | Date: 2017-03-29

There is provided a method for controlling a shape measuring apparatus which can achieve both trajectory correcting capability and control stability. A stylus tip is moved along a scanning path while controlling the stylus tip so as to keep an amount of deflection of a probe to a workpiece to be a reference amount of deflection. A movement instruction for the probe is generated according to a combined velocity vector V represented by the following expression: where Vf is a path velocity vector to move the probe along the scanning path,Ve is a deflection correcting vector to keep the amount of deflection of the probe to the workpiece to be the reference amount of deflection,Vc2 is a second trajectory correcting vector represented by (Vc1.q)q,Vc1 is a first trajectory correcting vector to correct a position of the probe so that the stylus tip heads to the scanning path, andq is a trajectory correcting direction vector given by a vector product of a normal line of a surface of the workpiece and the path velocity vector Vf.


Patent
Mitutoyo Corporation | Date: 2017-01-04

An optical probe (2) comprising a first resonant scanner (23) having a first mirror (23A) configured to rotate centered around a drive axis (L), the first resonant scanner (23) reflecting emitted light from a light source (21) toward a measured object (A); and a second resonant scanner (24) having a second mirror (24A) configured to rotate centered around the drive axis (L), the second resonant scanner (24) configured to reflect reflected light from the measured object (A) toward a photoreceiver (26). The first mirror (23A) and the second mirror (24A) are rotationally driven in synchronization.

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