MicroTechnologies Laboratory

Trento, Italy

MicroTechnologies Laboratory

Trento, Italy
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Anopchenko A.,University of Trento | Marconi A.,University of Trento | Wang M.,University of Trento | Pucker G.,Advanced Photonics and Photovoltaics | And 2 more authors.
Applied Physics Letters | Year: 2011

We propose a simple way to engineer the energy band gap of an ensemble of silicon nanocrystal (Si-NC) embedded in SiO2 via thickness/ composition profiling of Si-NC multilayers. By means of a complementary metal-oxide-semiconductor compatible process, light emitting diodes (LEDs) which incorporate graded energy gap Si-NC multilayers in the active region have been grown. Electrical and optical properties of these graded Si-NC LEDs demonstrate the ability of the proposed method to tailor the optoelectronic properties of Si-NC devices. © 2011 American Institute of Physics.


Mukhiya R.,Indian Institute of Technology Kharagpur | Bagolini A.,MicroTechnologies Laboratory | Bhattacharyya T.K.,Indian Institute of Technology Kharagpur | Lorenzelli L.,MicroTechnologies Laboratory | Zen M.,MicroTechnologies Laboratory
Microelectronics Journal | Year: 2011

In the present work, most common compensation structures (〈1 1 0〉 squares and 〈1 0 0〉 bars) have been used for convex corner compensation with 25 wt% TMAH-water solution at 90±1 °C temperature. Etch flow morphology and self-align properties of the compensating structures have been investigated. For 25 wt% TMAH water solution {3 1 1} plane is found to be responsible for corner undercutting, which is the fast etch plane. Etch-front-attack angle is measured to be 24°. Generalized empirical formulas are also discussed for these compensation structures for TMAH-water solution. 〈1 1 0〉 square structure protects mesa and convex corner and is the most space efficient compared to other compensation structures, but unable to produce perfect convex corner as 〈1 0 0〉 bar type structures. Both the 〈1 0 0〉 bar structures provide perfect convex corners, but 〈1 0 0〉 wide bar structure is more space efficient than the 〈1 0 0〉 thin bar structure. Implications of these compensation structures with realization of accelerometer structure have also been discussed. A modified quad beam accelerometer structure has been realized with these compensation structures using 25 wt% TMAH. © 2010 Elsevier Ltd. All rights reserved.

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