Micro Resist Technology GmbH

Berlin, Germany

Micro Resist Technology GmbH

Berlin, Germany
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Cadarso V.J.,Ecole Polytechnique Federale de Lausanne | Perera-Nunez J.,University of Extremadura | Perera-Nunez J.,CIBER ISCIII | Jacot-Descombes L.,Ecole Polytechnique Federale de Lausanne | And 6 more authors.
Optics Express | Year: 2011

Ink-jet printing of optical ink over SU-8 pillars is here proposed as a technology for obtaining microlenses with shape control. To demonstrate the flexibility of this method, microlenses with five different contour shapes (ranging from circular and elliptical to toric or more advanced geometries) have been fabricated. Furthermore, the optical properties of the different fabricated lenses have been experimentally investigated. Focal distance, numerical aperture (NA) and full-width at half maximum (FWHM) of the microlenses have been determined. Arrays of microlenses showed an identical behavior with a standard deviation in the total intensity of only 7%. Additionally, the focal plane of the fabricated symmetric microlenses and the Sturm interval of the non-symmetric ones have been obtained. The experimental results demonstrate the validity and flexibility of the proposed technology. © 2011 Optical Society of America.


Kim J.Y.,Ecole Polytechnique Federale de Lausanne | Kim J.Y.,Electronics and Telecommunications Research Institute | Pfeiffer K.,Micro Resist Technology GmbH | Voigt A.,Micro Resist Technology GmbH | And 2 more authors.
Journal of Materials Chemistry | Year: 2012

A shape-tunable approach is demonstrated for the fabrication of multi-scale polymer microlenses (μ-lenses) and microlens arrays (MLAs) using an ink-jet printing (IJP) technique. Also, the influence of the surface wetting conditions on the geometrical and optical characteristics of the printed μ-lenses is investigated. A photo-curable organic-inorganic hybrid polymeric resist (H-resist) is used; it is printed on a hydrophobic-treated glass substrate with different number of drops per μ-lens and cured using an ultraviolet lamp (UV lamp). High quality μ-lenses and MLAs with good uniformity and reproducibility were fabricated. The lens diameters and heights were controllable by changing the number of H-resist drops together with tuning the surface wetting conditions; these shape changes affect the optical properties of the μ-lenses and MLAs such as the numerical aperture (NA) and focal distance (f), as well as the f-number (f #), which indicates the light-gathering power. The optical properties of the tunable μ-lenses and MLAs are very attractive for application in optical systems such as interconnects and pixelated imagine sensors that use CCD or SPAD arrays, offering an efficient, simple and cheap alternative to the conventionally used photolithography technique. © 2012 The Royal Society of Chemistry.


Kirchner R.,TU Dresden | Kirchner R.,Fraunhofer Institute for Photonic Microsystems | Kirchner R.,Paul Scherrer Institute | Finn A.,TU Dresden | And 5 more authors.
Journal of Lightwave Technology | Year: 2014

The direct patterning of hybrid-polymer microring resonators with minimal residual layers by UV-assisted nanoimprint lithography is reported. The proposed stamp-and-repeat technology requires no post-processing. The imprint polymer was applied by spin-coating as a 130-150 nm thin initial film for an optimized processing. The importance of the initial film thickness is discussed in detail. Aspect ratios of more than 5:1 were realized with 2 μm high ridge-waveguides and sub-400 nm coupling gaps on maximal 130 nm thin residual layers. The achieved ratio of structure height to residual layer thickness of 15.4 (2 μm versus 130 nm) was much larger than the typical values in high-resolution imprinting and superseded the removal of the residual layer completely. The resonators are thought as biosensor transducers. High quality devices with Q-factors up to 13 000 were produced with a minimal set of process steps. © 2014 IEEE.


Sabel T.,TU Berlin | Orlic S.,TU Berlin | Pfeiffer K.,Micro Resist Technology GmbH | Ostrzinski U.,Micro Resist Technology GmbH | Grutzner G.,Micro Resist Technology GmbH
Optical Materials Express | Year: 2013

We present a new organic photosensitive material for volume holographic recording. Advanced material composition and sample preparation eliminates the need for a protective layer and allows layer fabrication with variable thickness and a free surface. Optimized chemical formulation results in a high energetic sensitivity, high angular selectivity and high inducible refractive index contrast. We investigate the photoresponse and nonsinusoidal refractive index profiles. We demonstrate highly resolved optical structuring with up to 8000 lines per mm. Imaging of the holographic phase gratings is accomplished by optical microscopy. © 2013 Optical Society of America.


Peroz C.,Abeam TechNologies, Inc. | Dhuey S.,Lawrence Berkeley National Laboratory | Volger M.,Micro Resist Technology GmbH | Wu Y.,Oxford Instruments | And 2 more authors.
Nanotechnology | Year: 2010

A step and repeat UV nanoimprint lithography process on pre-spin coated resist film is demonstrated for patterning a large area with features sizes down to sub-15 nm. The high fidelity between the template and imprinted structures is verified with a difference in their line edge roughness of less than 0.5 nm (3s deviation value). The imprinted pattern's residual layer is well controlled to allow direct pattern transfer from the resist into functional materials with very high resolution. The process is suitable for fabricating numerous nanodevices. © 2010 IOP Publishing Ltd.


Voigt A.,Micro Resist Technology GmbH | Ostrzinski U.,Micro Resist Technology GmbH | Pfeiffer K.,Micro Resist Technology GmbH | Kim J.Y.,Ecole Polytechnique Federale de Lausanne | And 3 more authors.
Microelectronic Engineering | Year: 2011

The advent of cell phone cameras extensively pushed market needs for micro lenses and supported developments like the Wafer-Level-Camera Technology [1]. Different optical applications and patterning methods for micro lenses require different sets of materials. Micro ink-jet printing (micro IJP) is an alternative and innovative direct patterning method for the manufacture of micro optical systems. We demonstrate the development of two material compositions - an epoxy resin and a sol-gel based material - which are used as inks with physical parameters adapted to the patterning technique so that stable and reproducible drops in both continuous and drop-on-demand (DoD) mode can be generated. The manufacturing of micro lenses, the lens characterization, their geometry and their optical properties are presented. © 2011 Elsevier B.V. All rights reserved.


Schleunitz A.,Paul Scherrer Institute | Spreu C.,Paul Scherrer Institute | Vogler M.,Micro Resist Technology GmbH | Atasoy H.,Micro Resist Technology GmbH | Schift H.,Paul Scherrer Institute
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics | Year: 2011

Sloped and stepped 3D structures were added to surface-patterned resists using grey-scale electron beam lithography and thermal reflow. A poly(methyl methacrylate) resist with moderate initial molecular weight of 120 kg/mol was chosen, which enabled processing with both nanoimprint and electron beam lithography. Using proper exposure doses, a molecular weight distribution was generated that allowed a selective thermal postprocessing of the exposed steps while the imprinted gratings on top of the resist were preserved. This allows fabricating mixed structures of microprisms surrounded by large-area nanogratings in the same resist layer. Working stamps were casted from the template pattern and subsequently replicated using thermal nanoimprint. As a possible application, backlight devices with arrays of light outcoupling prisms can be seen. © 2011 American Vacuum Society.


Kirchner R.,Paul Scherrer Institute | Schleunitz A.,Micro Resist Technology GmbH | Schift H.,Paul Scherrer Institute
Journal of Micromechanics and Microengineering | Year: 2014

An intensive, energy-based analysis of the thermal reflow of thermoplastic polymer structures is presented. Poly (methyl methacrylate) (PMMA) was patterned by grayscale electron beam lithography. The obtained rectangular, micron-scale structures were transformed into lens-like structures by thermal reflow near the glass transition temperature of the original PMMA. Representative parameters obtained from these reflow experiments were used to model the reflow process by using a new, energy-based, finite element, soapfilm method using the free software Surface Evolver. The time-, temperature- and molecular-weight-dependent geometry evolution of the PMMA structures could be described by an apparent contact-angle-evolution time constant and a shape-evolution time constant. The developed model allows the prediction of intermediate geometries during the reflow process occurring between the initial and the final energy optimal geometry. The proposed model is independent from the explicit knowledge of material-specific parameters such as viscosity or glass transition temperature. Extensive experimental data for PMMA reflow is provided. Simulation examples are given for a contact-angle-dominated reflow which demonstrate a good agreement between model and experiment. © 2014 IOP Publishing Ltd.


Hermannsson P.G.,Technical University of Denmark | Sorensen K.T.,Technical University of Denmark | Vannahme C.,Technical University of Denmark | Smith C.L.C.,Technical University of Denmark | And 4 more authors.
Optics Express | Year: 2015

An all-polymer photonic crystal slab sensor is presented, and shown to exhibit narrow resonant reflection with a FWHM of less than 1 nm and a sensitivity of 31 nm/RIU when sensing media with refractive indices around that of water. This results in a detection limit of 4.5×10-6 RIU when measured in conjunction with a spectrometer of 12 pm/pixel resolution. The device is a two-layer structure, composed of a low refractive index polymer with a periodically modulated surface height, covered with a smooth upper-surface high refractive index inorganic-organic hybrid polymer modified with ZrO2-based nanoparticles. Furthermore, it is fabricated using inexpensive vacuum-less techniques involving only UV nanoreplication and polymer spin-casting, and is thus well suited for single-use biological and refractive index sensing applications. © 2015 Optical Society of America.


Schleunitz A.,Paul Scherrer Institute | Spreu C.,Paul Scherrer Institute | Makela T.,VTT Technical Research Center of Finland | Haatainen T.,VTT Technical Research Center of Finland | And 2 more authors.
Microelectronic Engineering | Year: 2011

A straight-forward fabrication process was developed for hybrid layered molds consisting of a flexible metal plate as a mechanical support covered with a sol-gel layer with a nanostructured surface relief. The bendable stamp was tested under high speed roll-to-roll (R2R) manufacturing condition. A sufficient stamp lifetime was found, since no structural degradation was observed after a continuous imprint of more than 40 m. Thus, it is shown that hybrid molds are good and inexpensive alternatives to electroplated shims usually used in R2R embossing. © 2011 Elsevier B.V. All rights reserved.

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