Mf Stelmakh Research Institute Polyus

Moscow, Russia

Mf Stelmakh Research Institute Polyus

Moscow, Russia
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Boltar K.O.,Orion Research and Production Association | Chinareva I.V.,Orion Research and Production Association | Taubkin I.I.,Orion Research and Production Association | Sednev M.V.,Orion Research and Production Association | And 7 more authors.
Applied Physics | Year: 2013

Results of work on growth of AlGaN/AIN heterostructures on sapphire substrates by MOVPE, suitable for manufacturing of solar-blind p-i-n-photodiodes, and results of researches of ultraviolet photodetectors arrays of a format 320x256 on their basis are presented. The surface defects of AlGaN heterostructures are investigated by high-resolution microscopy and their influence on deficiency of elements of ultra-violet photodetectors array are presented.

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