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Milosevic M.,MeV Technologies
Applied Spectroscopy | Year: 2013

This is an unusual paper in that it does not address a particular research topic or present a novel experimental method or a new theoretical result. This paper addresses our basic understanding of the nature of the evanescent wave, the wave that is the basis of the entire field of Attenuated Total Reflection (ATR) spectroscopy. I recently had the opportunity to reexamine the foundations of ATR spectroscopy and was surprised to have had to change my own mental picture of the evanescent wave that I have built over the last 25 years. Over the years I have had numerous discussions with a large number of workers in the field as well as with my former mentor, and one of the originators and the principal developer of ATR spectroscopy, the late N.J. Harrick. Everything brought up in all these discussions was perfectly consistent with my old mental picture of the evanescent wave. Thus, I believe that the picture of the evanescent wave that I had is virtually universally held by workers in the field. This paper describes the new picture of the evanescent wave that emerged from said reexamination process. © 2013 Society for Applied Spectroscopy. Source

Milosevic M.,MeV Technologies | King S.W.,Intel Corporation
Journal of Applied Physics | Year: 2012

Transmission spectra of thin films on double side polished substrates feature a quasi sinusoidal baseline superimposed onto the true absorption spectra of the thin film. The quasi sinusoidal baseline is due to strong interference from multiple reflections within the film and can directly affect the relative degree of the measured absorption in the film. In a previous article [S. W. King and M. Milosevic, J. Appl. Phys. 111, 073109 (2012)], we described a method for the removal of these optical effects from infrared transmission spectra. This method renormalizes the spectrum and removes modulations imprinted onto the absorption by interference fringes. Here, we use simulated spectra for a model material to explicitly validate that the proposed correction procedure accurately extracts the pure absorption coefficient of the thin film and is not an ad hoc baseline correction procedure. © 2012 American Institute of Physics. Source

King S.W.,Intel Corporation | Milosevic M.,MeV Technologies
Journal of Applied Physics | Year: 2012

In this paper we present a method that allows extraction of the absorption coefficient of a thin film from transmittance spectrum of the film on a silicon substrate. The method essentially removes all optical effects, such as interference fringes, reflectance losses, substrate absorption, etc. The method requires that the refractive index of the film is known at one wavelength and that the thickness of the film is approximately known, both of which are generally available from ellipsometric measurements. As a by-product of the procedure, the method also extracts optical constants of the film over the entire spectral range of interest and provides improved values of thickness and refractive index over those provided by ellipsometry. © 2012 American Institute of Physics. Source

Berets S.L.,Harrick Scientific Products | Milosevic M.,MeV Technologies
Applied Spectroscopy | Year: 2012

Absolute reflectance measurements are valuable to the optics industry for development of new materials and optical coatings. Yet, absolute reflectance measurements are notoriously difficult to make. In this paper, we investigate the feasibility of extracting the absolute reflectance from a relative reflectance measurement using a reference material with known refractive index. © 2012 Society for Applied Spectroscopy. Source

Milosevic M.,MeV Technologies | King S.W.,Intel Corporation
ECS Journal of Solid State Science and Technology | Year: 2014

Fourier transform infrared (FTIR) spectroscopy is a popular technique for qualitatively investigating the chemical bonding of low dielectric constant (low-k) materials utilized in nanoelectronic Cu interconnects. However, quantitative FTIR analysis of low-k materials with widely varying stoichiometry has proven challenging due to numerous optical interference effects, variations in IR absorption strength with optical constants, and a negligible IR activity for homopolar bonds. In this paper, these challenges are overcome to demonstrate full elemental composition analysis by applying multivariate partial least squares (PLS) modeling to the true IR absorbance spectra obtained using previously described methods for eliminating optical interference effects from thin film FTIR spectra. To demonstrate the validity of this approach, transmission FTIR spectra were collected from a series of low-k a-SiC:H thin films with hydrogen content ranging from 25-60%. The elemental concentrations determined from PLS analysis of the corrected low-k a-SiC:H FTIR spectra were found to be in agreement to within ±5% of results obtained from independent nuclear reaction analysis and Rutherford backscattering measurements. These results demonstrate a clear path for establishing transmission FTIR as a quantitative metrology for full compositional analysis (elemental and chemical bond) for a wide range of thin film materials. © 2014 The Electrochemical Society. All rights reserved. Source

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