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Tsukuba, Japan

Naito T.,Macro Center | Konno N.,Macro Center | Tokunaga T.,Macro Center | Itoh T.,Japan National Institute of Advanced Industrial Science and Technology
Proceedings of IEEE Sensors | Year: 2012

We investigated the doping properties of polycrystalline silicon (poly-Si) deposited by atmospheric pressure plasma enhanced chemical transport and fabricated a strain gauge with the doped poly-Si film. The doping was done by the chemical transport of the dopant in Si sources. The electronic properties reveal that most of the dopants were transported as Si atoms. A strain gauge was fabricated with the doped poly-Si film. All processes were carried out below 350 °C. The strain gauge showed the good linearity of the resistance change rate with the stress. These results indicate that our Si deposition method has adequate potential for low temperature MEMS processes. © 2012 IEEE. Source


Naito T.,Macro Center | Konno N.,Macro Center | Tokunaga T.,Macro Center | Itoh T.,Macro Center | Itoh T.,Japan National Institute of Advanced Industrial Science and Technology
Microsystem Technologies | Year: 2013

This paper reports a local ambient gas control technology for atmospheric MEMS processes, especially plasma processes, using a new local ambient gas control head. First, the local ambient gas control with this head was investigated by a computational fluid dynamics code. After confirmation of the safe evacuation and the feasible cleanness level, which is comparable to the impurity level in semiconductor grade gas (below 10 ppm), a prototype apparatus was fabricated based on the simulation results. Measuring gas distribution by a gas analyzer, a O2 meter and a dew point meter, the local ambient gas control was confirmed experimentally. Next, H2 plasma generation was achieved in open air with H2 concentrations of 0-100 % even above the explosive limit in air (4.1 %) safely. In addition, Cu reduction and SiO2 etching by H2 plasma were demonstrated in open air. These results show high potential of our local ambient gas control technology for atmospheric MEMS processes. © 2013 Springer-Verlag Berlin Heidelberg. Source


Yamashita T.,Macro Center | Miyake K.,Macro Center | Miyake K.,Japan National Institute of Advanced Industrial Science and Technology | Itoh T.,Macro Center | Itoh T.,Japan National Institute of Advanced Industrial Science and Technology
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | Year: 2012

This paper reported a novel innovation of electrical contact structure in flexible device technology. The poly(3,4-ethylenedioxythiophene) poly(4-styrenesulfonate) coated silicone elastomer structure is employed in composing the electrical circuit through a large area of woven electronic textile (e-textile), and functions as the electrical contact between weft and warp (interlaced) fiber ribbons. The structure enhances the durability, flexibility and stability of electrical contact in the woven e-textile better than those of the ribbons without it. © 2012 IEEE. Source


Yang Z.,Japan National Institute of Advanced Industrial Science and Technology | Zhang Y.,Macro Center | Zhang Y.,Japan National Institute of Advanced Industrial Science and Technology | Itoh T.,Macro Center | Itoh T.,Japan National Institute of Advanced Industrial Science and Technology
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | Year: 2013

A flexible implantable micro temperature sensor has been proposed and fabricated on a polymer capillary by surface micromachining. The dynamic temperature response of the sensor when used in the hyperthermia is simulated and analyzed. The micro sensor has been successfully fabricated by our developed cylindrical projection lithography system. Platinum film is used as the sensing element material considering its good stability and linear resistance- temperature relationship. The temperature coefficient of resistance (TCR) and the current-voltage curves of the sensor prototype have been tested and evaluated. The test average TCR value derived from the fitted line is 0.0035/°C, which has a good agreement with industry standard value of the bulk Pt resistor sensor. The present flexible micro temperature sensor could be widely used as a precise implantable monitoring device in various biomedical applications. © 2013 IEEE. Source


Takamatsu S.,Macro Center | Imai T.,Macro Center | Yamashita T.,Macro Center | Kobayashi T.,Japan National Institute of Advanced Industrial Science and Technology | And 2 more authors.
Proceedings of IEEE Sensors | Year: 2011

We proposed flexible fabric keyboard which consists of conductive polymer of PEDOT:PSS-coated fibers, standard Micro Control Unit (MCU) with capacitance measurement circuits and personal computer (PC). In the sensor structure, PEDOT:PSS and UltraViolet(UV) -curable adhesive-coated fibers were woven as wefts and warps. The conductive polymer and insulating polymer coating technique was developed to form functional material on enough long fibers to weave fabric with. The weaving with automatic looming machine was employed, forming 1.2 m x 3 m sensor fabric. The sensors could detect human touch by measuring capacitance change between human fingers. The values of capacitance change under touch input ranges from 1.0 to 2.0 pF which is able to be detected by conventional capacitance meters that were integrated in MCUs. By using 9 by 3 touch sensors, keyboard was constructed and the demonstration of inputting character was made. © 2011 IEEE. Source

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