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Alzenau in Unterfranken, Germany

Patent
Saint - Gobain and Leybold Optics GmbH | Date: 2011-02-14

The invention relates to a heat treatment inner chamber ( The invention furthermore relates to a heat treatment inner chamber (


Patent
Leybold Optics GmbH | Date: 2015-06-19

The invention concerns an optical coating (


Patent
Leybold Optics GmbH | Date: 2011-10-21

The invention relates to an apparatus ( The invention also relates to a process for coating a surface (


A method for reducing the optical loss of the multilayer coating below a predetermined value in a zone by producing coating on a displaceable substrate in a vacuum chamber with the aid of a residual gas using a sputtering device. Reactive depositing a coating on the substrate by adding a reactive component with a predetermined stoichiometric deficit in a zone of the sputtering device. Displacing the substrate with the deposited coating into the vicinity of a plasma source, which is located in the vacuum chamber at a predetermined distance from the sputtering device. The plasma action of the plasma source modifying the structure and/or stoichiometry of the coating, preferably by adding a predetermined quantity of the reactive component to reduce the optical loss of the coating.


The invention relates to an apparatus (

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