LANN Laboratory for Nanofabrication of Nanodevices

Padova, Italy

LANN Laboratory for Nanofabrication of Nanodevices

Padova, Italy
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Perino M.,University of Padua | Pasqualotto E.,University of Padua | De Toni A.,University of Padua | Garoli D.,University of Padua | And 7 more authors.
Applied Optics | Year: 2014

This work presents an integrated plasmonic biosensing device consisting of a one-dimensional metallic lamellar grating designed to exploit extraordinary transmission of light toward an underlying silicon photodetector. By means of finite element simulations, the grating parameters have been optimized to maximize the light transmission variation induced by the functionalization of the gold nanostructures. An optimized grating was fabricated using an electron beam process and an optoelectronic test bench suitable for sample tests was developed. A clear difference in the grating transmitted light due to surface functionalization was observed in presence of TM polarized illumination. © 2014 Optical Society of America.


Zilio P.,University of Padua | Zilio P.,LaNN Laboratory for Nanofabrication of Nanodevices | Sammito D.,LaNN Laboratory for Nanofabrication of Nanodevices | Sammito D.,CNR Institute of Materials | And 7 more authors.
Optical Nanostructures for Photovoltaics, PV 2010 | Year: 2010

Optical simulations of 1D digital plasmonic grating show that SPPs and cavity-mode resonances can be effectively exploited to enhance NIR-light absorption in shallower regions of a Silicon substrate. © 2010 Optical Society of America.


Rech S.,LANN Laboratory for Nanofabrication of Nanodevices | Surpi A.,LANN Laboratory for Nanofabrication of Nanodevices | Vezzu S.,LANN Laboratory for Nanofabrication of Nanodevices | Patelli A.,LANN Laboratory for Nanofabrication of Nanodevices | And 5 more authors.
Vacuum | Year: 2013

Ti2AlC coatings have been fabricated by cold-spray deposition. The microstructure evolution as a function of basic spray parameters temperature and pressure onto AA6060 aluminium alloy and 1.0037 steel substrates has been studied. Adherent and dense 50-80 μm thick Ti2AlC coatings were deposited on soft AA6060 substrates under gas temperature and pressure of 600 °C and 3.4 MPa, respectively, whilst comparable results were obtained on harder 1.0037 steel by using higher temperature (800 °C) and pressure (3.9 MPa). © 2013 Elsevier Ltd. All rights reserved.


Monaco G.,CNR Institute for Photonics and Nanotechnologies | Monaco G.,University of Padua | Suman M.,CNR Institute for Photonics and Nanotechnologies | Garoli D.,University of Padua | And 6 more authors.
Journal of Electron Spectroscopy and Related Phenomena | Year: 2011

Silicon carbide (SiC) is an important material for several applications ranging from electronics to Extreme UltraViolet (EUV) space optics. Crystalline cubic SiC (3C-SiC) has a wide band gap (near 2.4 eV) and it is a promising material to be used in high frequency and high energetic electronic devices. We have deposited, by means of pulsed laser deposition (PLD), different SiC films on sapphire and silicon substrates both at mild (650 °C) and at room temperature. The resulted films have different structures such as: highly oriented polycrystalline, polycrystalline and amorphous which have been studied by means of X-ray absorption spectroscopy (XAS) near the Si L2,3 edge and the C K edge using PES (photoemission spectroscopy) for the analysis of the valence bands structure and film composition. The samples obtained by PLD have shown different spectra among the grown films, some of them showing typical 3C-SiC absorption structure, but also the presence of some Si-Si and graphitic bonds. © 2011 Elsevier B.V.


Pistore A.,University of Padua | Guglielmi M.,University of Padua | Brusatin G.,University of Padua | Kang H.K.,Nanyang Technological University | And 6 more authors.
Solid State Sciences | Year: 2010

Sol-gel hybrid films based on alkyl bridged polysilsesquioxanes and doped with phenol red molecules, were synthesized for sensing purposes. Doped films changes colour from yellow to orange to red when exposed to hydrochloric acid (HCl) both in solution and gas phases. The synthesis was optimized in order to produce porous films after spin coating. The porosity increases reacting surface area and chemical reactivity of the sensing thin film. Porosity, optical and structural characterizations of these films were investigated by transmission electron microscopy (TEM), Fourier Transform Infrared Spectroscopy (FT-IR) and Spectroscopic Ellipsometry (SE). Variation of optical characteristics upon immersion of the film in the solution was characterized by UV-visible (UV-vis) spectroscopy. Moreover the same porous sensitive hybrid film was deposited on gold sinusoidal grating in order to detect variations of the dielectric film optical constant after HCl solution dip. This variation was revealed by monitoring surface plasmon polariton excitations. © 2010 Elsevier Masson SAS. All rights reserved.


Garoli D.,University of Padua | Garoli D.,LaNN Laboratory for Nanofabrication of Nanodevices | Ruffato G.,CNR Institute of Neuroscience | Cattarin S.,CNR Institute of Neuroscience | And 6 more authors.
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics | Year: 2013

The authors present their work in the preparation of nanoporous gold layers and their patterning with an original procedure preserving the porosity, to obtain the phenomenon of extraordinary transmission of light with a porous material. The design, fabrication, and characterization of nanoslit arrays made with bulk gold and nanoporous gold films are presented and their sensing performances are compared after coating with thiolated organic molecules. Thanks to a greatly enhanced surface-to-volume ratio, nanoporous gold reveals benefits for better reaction efficiency and detection sensitivity. Moreover, plasmonic properties in the near-IR range assure employment in plasmonic devices. © 2013 American Vacuum Society.


Di Falco A.,University of St. Andrews | Massari M.,LANN Laboratory for Nanofabrication of Nanodevices | Scullion M.G.,University of St. Andrews | Schulz S.A.,University of St. Andrews | And 2 more authors.
IEEE Photonics Journal | Year: 2012

We have fabricated and characterized a set of slotted photonic crystal (SPhC) waveguides in silicon-on-insulator (SOI) with a length of up to 300 μ and slot widths ranging between 115 and 145 nm. We observe an upper limit for the loss of 11 dB/cm. © 2012 IEEE.

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