Laboratoire Of Microelectronique Et Instrumentation

Tunisia

Laboratoire Of Microelectronique Et Instrumentation

Tunisia
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El Gmati I.,Hoffmann-La Roche | El Gmati I.,Laboratoire Of Microelectronique Et Instrumentation | Calmon P.F.,Hoffmann-La Roche | Calmon P.F.,National Polytechnic Institute of Toulouse | And 9 more authors.
Journal of Micromechanics and Microengineering | Year: 2011

We propose a new type of on-chip micro-variable inductor fabricated by using microelectronic technology and lamination process. The proposed inductor is a dual circular coil and has an inductance of few nH. The fundamental idea is to place a liquid droplet between the metal turns of a coil in order to modify the capacitive/resistive coupling between metal tracks and hence to change the stored magnetic energy. In this study salt water has been used to fill partly or totally the channels constituting these three-dimensional coils. The numerical modeling allows us to obtain inductance values according to the liquid position, which can rise from zero to 100% of the total length of channels. The SU-8 resin was used to realize the microfluidic channels and Au as metallic tracks. The measured electrical characteristics show that these devices can be used up to 1.6 GHz frequency. The relationship between the inductance and the liquid position indicates that the tuning range of the inductance is approximately 107% (from 5.4 to 2.6 nH at a frequency of 1.6 GHz). Without liquid, the peak quality factor is 12, and the self-resonance frequency is 4 GHz; when the channels are completely full, these parameters become respectively 6 and 4.3 GHz. © 2011 IOP Publishing Ltd.


El Gmati I.,Hoffmann-La Roche | El Gmati I.,Laboratoire Of Microelectronique Et Instrumentation | Calmon P.,Hoffmann-La Roche | Calmon P.,National Polytechnic Institute of Toulouse | And 7 more authors.
Procedia Engineering | Year: 2010

This paper reports on the design, fabrication and characterization of a new class of liquid RF variable inductor. These inductors have been designed for 2.5 GHz applications. SU8 laminated films have been used to realize the fluidic part of the inductance. Water and non toxic metal-liquid (Galinstan) are considered. The large contact area between the liquid and the spires lead to high variation ratio of the inductance with high quality factor. The proposed variable inductor is perspective key component for the multi-band RF circuits such as electrically controllable matching circuits and wide tuning range voltage controlled oscillator (VCO).


El Gmati I.,Hoffmann-La Roche | El Gmati I.,Laboratoire Of Microelectronique Et Instrumentation | Calmon P.F.,Hoffmann-La Roche | Calmon P.F.,Toulouse 1 University Capitole | And 7 more authors.
Microsystem Technologies | Year: 2014

In this work, RF MEMS continuous reversible variable inductor has been fabricated by using microelectronic technology and lamination process. We review, evaluate and compare this variable inductor with other work. The proposed inductor is a dual circular coil and has an inductance of few nH. The fundamental idea is to place a liquid droplet between the metal turns of a coil in order to modify the capacitive/resistive coupling between metal tracks and hence to change the stored magnetic energy. The SU-8 resin was used to realize the microfluidic channels and Au as metallic tracks. To prove the reversibility of the inductor, two cases were studied: filling and emptying of channels. The tuning range of the inductance is approximately 107 % at 1.6 GHz, making these devices very suitable as building blocks in many RF applications. © 2013 Springer-Verlag Berlin Heidelberg.


El Gmati I.,CNRS Laboratory for Analysis and Architecture of Systems | El Gmati I.,Laboratoire Of Microelectronique Et Instrumentation | Calmon P.,CNRS Laboratory for Analysis and Architecture of Systems | Calmon P.,Hoffmann-La Roche | And 9 more authors.
Micro and Nano Letters | Year: 2010

A variable inductor based on liquid tuning has been fabricated and characterised. The fabrication process used SU-8 channel obtained by spin coating and lamination. A 107 tuning range with high inductance from 5.4 to 2.6nH is achieved. With no actuation, the peak quality factor is 12, and the self-resonance frequency is 4GHz. © 2010 The Institution of Engineering and Technology.


El Gmati I.,CNRS Laboratory for Analysis and Architecture of Systems | El Gmati I.,Laboratoire Of Microelectronique Et Instrumentation | Fulcrand R.,CNRS Laboratory for Analysis and Architecture of Systems | Fulcrand R.,National Polytechnic Institute of Toulouse | And 9 more authors.
5th Conference on Design and Technology of Integrated Systems in Nanoscale Era, DTIS 2010 | Year: 2010

This paper presents a continuously variable inductor for Radiofrequency applications. The inductor is built using lamination of photosensitive films process. The variation principle is based on the change area of the loop inductor. The fluid moves between inter-spires distance and shortening the path length of the current through the structure; leading to reduction of the stored magnetic energy, and hence the inductance. A detailed electrical analysis is conducted to predict the tuning range of the inductor using simulation tools such as HFSS. At 3 GHz, the simulated inductor is continuously varied from 7 nH to 2.98 nH, i.e., the variable range is above 100%. The fact that the device is fabricated on glass process enhances the potential for system integration. The proposed variable inductor is perspective key component for the multi-band RF circuits such as electrically controllable matching circuits and wide tuning range voltage controlled oscillator (VCO). © 2010 IEEE.

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