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Patent
KYOSAN Electrical Manufacturing CO. | Date: 2013-06-03

In an RF power supply for supplying RF power to a plasma load, reflected wave power control is performed in which the reflected wave power of an RF generator is detected and the RF generator is controlled. For a short-time variation in reflected wave power, control is performed based on a peak value variation in the detection value of reflected wave power. For a long-time variation in reflected wave power, control is performed based on a variation in a smoothed value obtained by smoothing detection values of reflected wave power. A reflected wave power control loop system includes a reflected wave power peak value dropping loop system and an arc blocking system that perform control based on a peak variation in reflected wave power and a reflected wave power amount dropping loop system that performs control based on a smoothed power amount of reflected wave power.


Patent
KYOSAN Electrical Manufacturing CO. | Date: 2012-09-07

Intermittent short-circuit control is performed in the ignition mode, thereby allowing short-circuit current to flow in the current source step-down type chopper. Energy of the short-circuit current is temporarily accumulated in the inductor provided in the current source step-down type chopper. The accumulated energy boosts the output voltage from the direct current power supply device during the period until the next short circuiting, via the current, the multiphase inverter, and the rectifier. The voltage boosting operation where accumulation of the current energy by short circuiting and boosting of the output voltage by conduction are repeated, controls an increase of the output voltage which is applied to the plasma generator.


Patent
KYOSAN Electrical Manufacturing CO. | Date: 2013-06-03

When RF power is supplied from an RF generator to a load via a power supply unit,


Patent
KYOSAN Electrical Manufacturing CO. | Date: 2012-09-05

A phase of the pulse control signal upon restarting is synchronized with the phase of the pulse control signal upon suspending, thereby suppressing fluctuations of output voltage in each phase of the inverter upon restarting and further suppressing fluctuations of voltage supplied to the load. Upon supplying DC power to a plasma generator, when arc discharge occurs in the plasma generator, supplying of the DC power is suspended to reduce damage on the electrodes and substrate, and further upon extinguishing of the arc discharge, supplying of the DC power is restarted. In suspending and resuming the DC output, the current flowing in the chopper upon suspending is held in the form of circulating current, and upon restarting the inverter, this circulating current is supplied to the load. Accordingly, it is possible to reduce a delay in supplying the DC power to the load, upon resuming the DC output.


An onboard system measures the train position by measuring the rotational speed of a tacho-generator, determines an estimated train occupancy range (in which the train may be present) using the train position, and transmits the estimated train occupancy range to a ground system. The onboard system corrects the train position based on the results of communication with a correction coil when the train has passed through the installation point of a correction coil. When the train position has been shifted backward as a result of correction that utilizes the correction coil, the onboard system determines and transmits the estimated train occupancy range based on the train position immediately before correction until the latest train position reaches the train position immediately before correction, and determines and transmits the estimated train occupancy range based on the latest train position after the latest train position has reached the train position immediately before correction.

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