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Reutlingen, Germany

Ring R.M.,Globalfoundries | Newkirk R.,Globalfoundries | Davidson K.,Globalfoundries | Capriola J.,Globalfoundries | And 3 more authors.
Conference Proceedings from the International Symposium for Testing and Failure Analysis | Year: 2015

The advances on IC technology have made defect localization extremely challenging. "Soft" failures (resistive vias and contacts) are typically difficult to localize using commonly available failure analysis (FA) techniques such as emission microscopy (EMMI) and scanning optical microscopy (SOM), and often cannot be observed by two-dimensional inspections using layer by layer removal. The article describes the Resistive Contrast Imaging (RCI) defect localization technique (also known as Electron Beam Absorbed Current (EBAC), instrumentations, and case studies on test structures or process control monitors especially designed to detect "soft" open failures on advanced (28nm and below) technology devices. It also lists the key SEM parameters critical for effective FA using the RCI nano-probing system. Copyright © 2015 ASM International® All rights reserved.

Hassel A.W.,Max Planck Institute Fur Eisenforschung | Hassel A.W.,Johannes Kepler University | Milenkovic S.,Max Planck Institute Fur Eisenforschung | Milenkovic S.,Johannes Kepler University | And 2 more authors.
Physica Status Solidi (A) Applications and Materials Science | Year: 2010

One gram of tungsten nanowires - equivalent to 5 billion single wires - was produced by electrochemically processing a directionally solidified eutectic NiAl-W alloy. Their release is realised by selective dissolution of the matrix with a yield beyond 98%. The nanowires are single crystals, homogeneous in diameter, and have extremely high aspect-ratios (>1000!). A multitude of potential applications are feasible - including sensing, probing, and high temperature nanotechnology. © 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

Hassel A.W.,Max Planck Institute Fur Eisenforschung | Hassel A.W.,Johannes Kepler University | Bello-Rodriguez B.,Max Planck Institute Fur Eisenforschung | Smith A.J.,Max Planck Institute Fur Eisenforschung | And 4 more authors.
Physica Status Solidi (B) Basic Research | Year: 2010

Directional solidification of eutectics is a route to produce iso-oriented metallic single crystalline nanowires (NWs). Etching or electrochemical oxidation allows selective dissolution of either of the phases to produce NW arrays, isolated NWs, nanopore arrays and also derived structures by combining various process steps. A good understanding of the thermodynamics and the kinetics of the phase transformation and chemical reactions including electrodissolution, passivation, selective etching, complexing of reaction products and electrodeposition in the systems NiAl-X (X=Re, W, Mo), Ag-Cu and Fe-Au was reached. Functional devices based on these NWs, like high aspect ratio NW based STM tips, nanoelectromechanical systems (NEMS), NW pH sensors and sensor arrays were constructed. Array of rhenium single crystalline NWs embedded in the NiAl matrix after partial dissolution of the matrix. © 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

News Article | April 2, 2015
Site: www.xconomy.com

Rick DeVos, Amway heir and founder of ArtPrize and Start Garden, is backing a new venture in Grand Rapids, MI: an Internet of Things accelerator. A member of the Techstars Global Accelerator Network, the Seamless Accelerator has forged partnerships with Michigan-based corporations that mostly manufacture or design things, DeVos said. Companies participating as partners in the Seamless coalition, as he calls it, include Steelcase, Amway, Meijer, Faurecia, Spectrum Health, and Priority Health. The Seamless Accelerator, which began accepting applications for its fall session last Friday, will be headquartered inside Start Garden’s new 15,000-square-foot space inside the Michigan Trust Building downtown. DeVos said the accelerator will operate for a year, and then backers will evaluate its success and decide whether to keep going. Anybody with Internet access can make and launch an app, DeVos said, but industrial design and manufacturing require a different skill set—one that happens to flourish in West Michigan, he added. “We still make things here, and there’s a lot of value in that,” he said. The Seamless Accelerator will host 10 companies twice a year. DeVos said the accelerator will offer financial support in the form of $25,000 in convertible notes and will “generally” get 6 percent equity in exchange. Seamless is hoping to attract international startups working on IoT innovations. “The promise of the Internet of Things is that we’ve interacted with environments like home or office, and now we’re making them smart,” said Seamless director Mike Morin, underscoring why companies like Steelcase, which manufactures office interiors, or Faurecia, the world’s largest supplier of automotive interiors, would be interested in supporting an IoT incubator. “People have to be able to move between these environments seamlessly, and that’s the reason we chose the name.” Though DeVos said the accelerator isn’t simply an acquisition pipeline for Seamless’s enterprise partners, he did point out that the idea is offer them collaborative, easy access to emerging technologies. (The corporate partners will also have a say in selecting which companies are accepted into the accelerator.) Participating startups, in turn, will get access to global corporations with massive resources and infrastructure. “The enterprises will articulate their pain points to the startups and they’ll have the opportunity to solve them, but there are no special hooks or first right of refusal,” Morin said. “If a startup has a really good idea, there’s a potential pathway to commercialization.” “Our partners offer immense competency in marketing, logistics, and distribution, which are traditional pain points for startups,” DeVos added. “We want to open these companies up to startups. Setting it up this way adds a lot of value for both parties.” This past fall, DeVos announced that Start Garden would stop making small, weekly investments in early-stage startups in favor of fewer, larger investments and continuing support of its portfolio companies. That decision, plus the announcement of the new IoT accelerator, highlights how quickly the Grand Rapids startup ecosystem is growing. “There’s a uniqueness to Grand Rapids,” Morin said. “There are significant corporate resources here, but it’s small enough that all the CEOs and innovation leaders know each other. That kind of social infrastructure, needed for collaboration, doesn’t exist in places like New York and Boston.” Sarah Schmid is the editor of Xconomy Detroit/Ann Arbor. You can reach her at 313-570-9823 or sschmid@xconomy.com. Follow @XconomyDET_AA

Arstila K.,IMEC | Hantschel T.,IMEC | Kleindiek S.,Kleindiek Nanotechnik GmbH | Sterr J.,Kleindiek Nanotechnik GmbH | And 4 more authors.
Microelectronic Engineering | Year: 2010

In nanoprobing measurements the quality of the electrical contact strongly depends on the contact force. Probing semiconductors such as silicon requires applying very high and stable forces to establish an ohmic contact between the probe tip and the structure under study. Therefore, a compact force control system is needed for nanoprobing measurements inside a high-resolution scanning electron microscopy (SEM) system. In this work we have developed an optical force measurement system (OFMS) for nanoprobing based on the reflection of a laser beam from a mirror of the probe towards a position-sensitive photodiode detector (PSD). The system principle is similar to the so-called optical-lever principle used in atomic force microscopy (AFM). However, geometrical restrictions of the SEM chamber and adjacent probes require the incident and reflected laser beams to be on the same plane as the probe cantilever. This is achieved by placing a small mirror element perpendicular onto the cantilever surface. The use of high-precision nanomanipulators with OFMS allows to position probe tips on a selected structure on a macroscopic-scale sample with nanometer precision. The slim design of the nanomanipulator and the OFMS system allows to place several force controlled tips on the same nanostructure. © 2009 Elsevier B.V. All rights reserved.

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