Wu M.-Z.,Soochow University of China |
Wu M.-Z.,Key Laboratory of Thin Film Materials of Jiangsu Province |
Jin C.-G.,Soochow University of China |
Jin C.-G.,Key Laboratory of Thin Film Materials of Jiangsu Province |
And 7 more authors.
Gongneng Cailiao/Journal of Functional Materials | Year: 2013
Thin films of Al-doped zinc oxide (AZO) were prepared on quartz glass substrates by RF magnetron sputtering method. Then the AZO films were post-treated with CCP/ICP C4F8/Ar discharge plasma. Atomic force microscope was used to investigate the textured structure and optical emission spectroscopy (OES) was used to analysis the fluorocarbons content. We found thatthe increase of the low-frequency power could result in higher content of F which lead to better textured structure. The high-frequency power didn't have much effect on the textured structure.