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Liu W.,Key Laboratory of Polarized Materials and Devices | Zhu J.,Key Laboratory of Polarized Materials and Devices | Wang Z.,Key Laboratory of Polarized Materials and Devices | Tang X.,Key Laboratory of Polarized Materials and Devices
Physica E: Low-Dimensional Systems and Nanostructures | Year: 2010

Dielectrophoresis is a potential technique which can be employed to manipulate micro-/nano-particles, fabricate micro/nano-devices and test the properties of materials in fluid. Among the influences on dielectrophoretic manipulation, the electrode configuration that dictates the radiation pattern of electric field is a point out one. In this paper, a novel wafer-level planar micro-electrode system was designed and fabricated by rapid, low-cost micro-fabrication technologies. This low-cost platform can meet the primary needs of DEP manipulation, is ideal for mass production and can augment the accessibility of DEP devices to end-users lacking fabrication facilities or knowledge. © 2010 Elsevier B.V. All rights reserved.

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