Key Laboratory of MEMS of the Ministry of Education

Nanjing, China

Key Laboratory of MEMS of the Ministry of Education

Nanjing, China
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Yang J.,Key Laboratory for Aerosol Cloud Precipitation of China Meteorological Administration | Yang J.,Nanjing University of Information Science and Technology | Liu Q.,Jiangsu Key Laboratory of Meteorological Observation and Information Processing | Liu Q.,Jiangsu Collaborative Innovation Center on Atmospheric Environment and Equipment Technology | Dai W.,Key Laboratory of MEMS of the Ministry of Education
Review of Scientific Instruments | Year: 2017

To improve the air temperature observation accuracy, a low measurement error temperature sensor is proposed. A computational fluid dynamics (CFD) method is implemented to obtain temperature errors under various environmental conditions. Then, a temperature error correction equation is obtained by fitting the CFD results using a genetic algorithm method. The low measurement error temperature sensor, a naturally ventilated radiation shield, a thermometer screen, and an aspirated temperature measurement platform are characterized in the same environment to conduct the intercomparison. The aspirated platform served as an air temperature reference. The mean temperature errors of the naturally ventilated radiation shield and the thermometer screen are 0.74 °C and 0.37 °C, respectively. In contrast, the mean temperature error of the low measurement error temperature sensor is 0.11 °C. The mean absolute error and the root mean square error between the corrected results and the measured results are 0.008 °C and 0.01 °C, respectively. The correction equation allows the temperature error of the low measurement error temperature sensor to be reduced by approximately 93.8%. The low measurement error temperature sensor proposed in this research may be helpful to provide a relatively accurate air temperature result. © 2017 Author(s).


Gao S.,Key Laboratory of MEMS of the Ministry of Education | Zhou Z.,Key Laboratory of MEMS of the Ministry of Education | Li W.,Key Laboratory of MEMS of the Ministry of Education | Huang Q.-A.,Key Laboratory of MEMS of the Ministry of Education
Sensors and Materials | Year: 2015

In this study, we proposed a novel test structure that can eliminate the effects of gravity and the release process and compared it with the traditional pull-in structure where the beam can vibrate laterally. This novel structure, which simply uses the top silicon layer to form a complete pull-in test structure, processes both a fixed-fixed beam and a fixed electrode on the top silicon layer of silicon-on-insulator (SOI). In addition, the equation concerning the applied voltage, Young's modulus, and residual stress was developed by the energy method. A parametric simulation was performed to obtain a structure with optimized dimensions and satisfy the equation concerning the applied voltage, Young's modulus, and residual stress. Experimental results show that the measurement system used has the advantages of high precision and rapid testing. The measured average Young's modulus is 110.9 GPa and the residual stress is 4.4914 MPa.

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