Key Laboratory of Inertial Science and Technology for National Defence

Beijing, China

Key Laboratory of Inertial Science and Technology for National Defence

Beijing, China

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Fan S.-C.,Beihang University | Fan S.-C.,Key Laboratory of Inertial Science and Technology for National Defence | Fan S.-C.,CAS Shanghai State Key Laboratory of Transducer Technology | Wang L.-D.,Beihang University | And 5 more authors.
Yuhang Xuebao/Journal of Astronautics | Year: 2010

This paper introduces a novel micro-electromechanical systems (MEMS) vibratory rate gyroscope based on resonant sensing of the Coriolis force. Its advantages include a quasi-digital FM (frequency modulation) output, high sensitivity, and flexible parameter design. As a whole, this structure is consisted of proof masses, frame suspensions, two-stage amplifying leverage mechanisms, double-ended tuning fork (DETF), driving and checking combs. The simulation results show that, while other performances do not change a lot, the sensitivity of the initial structure, the improved structure 1, the improved structure 2 and the final structure are 0.080, 0.210, 0.341 and 0.5447 Hz/(°/s) respectively. The sensitivity increased a lot after each improvement. Moreover, for the final structure, the amplitude of DETF is 1.16×10-4 times as big as that of the external mass in the driven direction. And the maximum relative deviation is 6.41×10-7 on the measurement range (±300 °/s).


Zhanshe G.,Beihang University | Zhanshe G.,Key Laboratory of Precision Opto mechatronics Technology | Zhanshe G.,Key Laboratory of Inertial Science and Technology for National Defence | Zhou F.,Beihang University | And 8 more authors.
Microsystem Technologies | Year: 2011

This paper introduces a new theoretical model of plate capacitor for MEMS comb actuator. In this model, bulk fabrication process and edge effect are both considered using integration method and conformal transformation theory. In order to verify the correctness of the model, FEM software is used to calculate the value of the capacitance of the MEMS comb actuator. The simulated result is 1.441 pF. Relative errors to the model calculated result 1.401 pF and ideal model calculated result 1.267 pF are 2.78 and 12.07% respectively. Then, high precision capacitance measuring device is used to measure the micro-fabricated comb actuator. The tested result is 1.517 pF. Its relative error to the rectified value is 7.65%, much less than the relative error to ideal result 16.48%. This further indicates the correctness of the rectified model. © 2010 Springer-Verlag.


Fan S.,Beihang University | Fan S.,Key Laboratory of Inertial Science and Technology for National Defence | Cao L.,Beihang University | Cao L.,Key Laboratory of Inertial Science and Technology for National Defence
Proceedings of SPIE - The International Society for Optical Engineering | Year: 2013

The micro-vibration of satellite is a key factor which affects the major performance of high precision camera. At the same time, it limits the improvement of the camera resolution, and it impacts the efficiency in resource exploration and emergency treatment of serious natural disasters. This paper starts with the vibrating environment of the satellite, then analyzes the impact on the camera platform that brought by space environment. On the above basis, this paper introduces several researches and developments concerning micro-vibration measurement, satellite simulation system and on-ground test method, evaluates performance and retaliating method of measurement system which referring to the examples at home and abroad that are related to stable platform. Finally, based on national research achievement, this paper points out the developing direction about relevant technology. © 2013 SPIE.


Li Y.,Beihang University | Li Y.,Key Laboratory of Precision Opto mechatronics Technology | Li Y.,Key Laboratory of Inertial Science and Technology for National Defence | Fan S.,Beihang University | And 11 more authors.
Journal of Sound and Vibration | Year: 2012

In this paper, frequency measurement methods of resonant vibratory gyroscopes are studied. First, the working principle and dynamic output characteristics of the resonant vibratory gyroscope are introduced, which provide a theoretical analysis base to analyze the dynamic frequency output characteristic of the resonant vibratory gyroscope. Moreover, some relevant frequency measurement methods are introduced, a frequency measurement method based on dynamic output characteristics has been proposed for the purpose of investigating the modulated output signal of resonant vibratory gyroscopes. Finally, in order to verify the feasibility of the proposed frequency measurement method, resonator oscillator and dynamic frequency measurement experiments of the resonant vibratory gyroscopes are built. It is concluded from the resonator oscillator result that the designed and observed resonant frequency of the resonator have a good match, which shows the design of resonator oscillator is feasible. It is concluded from the dynamic frequency measurement result that correlation coefficient of output fitted curve is 99.95%, and the output characteristic of the gyroscope is linear frequency output, which shows the effectiveness of the proposed frequency measurement method. © 2012 Published by Elsevier Ltd. All rightsreserved.


Zhanshe G.,Beihang University | Zhanshe G.,Key Laboratory of Inertial Science and Technology for National Defence | Ying A.,Beihang University | Ying A.,Key Laboratory of Inertial Science and Technology for National Defence | And 6 more authors.
Journal of Mechanical Science and Technology | Year: 2014

A new device is built to measure the mechanical characters of the double ended tuning fork which is used as the sensitive element of resonant sensor. It is mainly composed of a three dimensional workbench, a force sensor, a servo motor, control circuit and a photodiode. Detailed theoretical analysis is carried out to verify the feasibility of the design and some experiments have been done to test the performance of the device. Firstly, the calibrated result of the force sensor shows that the applied force possesses good linear relationship with the output voltage. Then, zero drift character indicates that the force drift is just 0.1N and the stability performance of the applied force is also detected. Finally, the axial force loading test is carried out. In conclusion, the above experiments prove that the designed scheme is right and reliable to measure the mechanical characters of the double ended tuning fork. © 2014, The Korean Society of Mechanical Engineers and Springer-Verlag Berlin Heidelberg.


Yan L.,Beihang University | Yan L.,Key Laboratory of Inertial Science and Technology for National Defence | Shangchun F.,Beihang University | Shangchun F.,Key Laboratory of Inertial Science and Technology for National Defence | And 6 more authors.
Microsystem Technologies | Year: 2012

Dynamic characteristics of resonators forMEMS resonant vibratory gyroscopes are studied in this paper. Firstly, a small parameter method is introduced to analyze the dynamic characteristic stability of the resonator. It is proved that geometrical parameters of the resonator have to be regulated to match corresponding stability analysis. In order to verify the rationality of the theoretical parameters design, static calibration experiment is built using a resonator sample. It is concluded from the calibrated result that the error between theory design and experiment is 0.03 %, which shows they have a good match, and the design of resonator isreasonable. Moreover, the method of small parameter perturbation is considered to analyze the input-output dynamic characteristic. Under some transformations, which make input angular velocity and output resonant frequency shift possess a good linear relationship. In order to verify the correctness of the theory analysis method, dynamic frequency output characteristic experiment is built using the resonant vibratory gyroscope sample. It is concluded from the dynamic measurement result that the correlation coefficient of output fitted curve is 99.95 %, the measured algorithm scale factor of the gyroscope sample is 0.2116, which prove theoretical analyzing approach is feasible. © 2012 Springer-Verlag.


Li J.,Beihang University | Li J.,Key Laboratory of Precision Opto mechatronics Technology Ministry of Education | Li J.,Key Laboratory of Inertial Science and Technology for National Defence | Li J.,North University of China | And 9 more authors.
Chinese Physics B | Year: 2012

The parametric dynamic stability of resonant beams with various parameters under periodic axial force is studied. It is assumed that the theoretical formulations are based on Euler-Bernoulli beam theory. The governing equations of motion are derived by using the Rayleigh-Ritz method and transformed into Mathieu equations, which are formed to determine the stability criterion and stability regions for parametrically-excited linear resonant beams. An improved stability criterion is obtained using periodic Lyapunov functions. The boundary points on the stable regions are determined by using a small parameter perturbation method. Numerical results and discussion are presented to highlight the effects of beam length, axial force and damped coefficient on the stability criterion and stability regions. While some stability rules are easy to anticipate, we draw some conclusions: with the increase of damped coefficient, stable regions arise; with the decrease of beam length, the conditions of the damped coefficient arise instead. These conclusions can provide a reference for the robust design of parametrically-excited linear resonant sensors. © 2012 Chinese Physical Society and IOP Publishing Ltd.


Fan S.-C.,Beihang University | Fan S.-C.,Key Laboratory of Precision Opto mechatronics Technology | Fan S.-C.,Key Laboratory of Inertial Science and Technology for National Defence | Li Y.,Beihang University | And 11 more authors.
Chinese Physics B | Year: 2012

Dynamic characteristics of the resonant gyroscope are studied based on the Mathieu equation approximate solution in this paper. The Mathieu equation is used to analyze the parametric resonant characteristics and the approximate output of the resonant gyroscope. The method of small parameter perturbation is used to analyze the approximate solution of the Mathieu equation. The theoretical analysis and the numerical simulations show that the approximate solution of the Mathieu equation is close to the dynamic output characteristics of the resonant gyroscope. The experimental analysis shows that the theoretical curve and the experimental data processing results coincide perfectly, which means that the approximate solution of the Mathieu equation can present the dynamic output characteristic of the resonant gyroscope. The theoretical approach and the experimental results of the Mathieu equation approximate solution are obtained, which provides a reference for the robust design of the resonant gyroscope. © 2012 Chinese Physical Society and IOP Publishing Ltd.

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