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She Y.,Key Laboratory of Fundamental Science Micro Nano Device System Technology | Wen Z.,Key Laboratory of Fundamental Science Micro Nano Device System Technology | Zhao X.,Key Laboratory of Fundamental Science Micro Nano Device System Technology | Deng L.,Key Laboratory of Fundamental Science Micro Nano Device System Technology | Shang Z.,Key Laboratory of Fundamental Science Micro Nano Device System Technology
Chinese Journal of Sensors and Actuators | Year: 2014

In recent years, a great effort has been devoted to the study of micro piezoelectric vibration energy harvester (VEH) with the development of Power MEMS. However, the output voltage of conventional d31 VEH based on a PZT film is generally low, which is difficult for application. In order to raise the output voltage of the MEMS piezoelectric vibration energy harvester, this paper presents a MEMS piezoelectric cantilever array structure which can raise the voltage by connecting the piezoelectric elements in series. By using the finite element method for structural simulation analysis and optimization, the optimized piezoelectric cantilever dimensions is 3 mm×2.4 mm×0.05 mm and silicon mass dimensions is 8 mm×12.4 mm×0.5 mm. The principle prototype was fabricated by MEMS fabrication process. The device produces a maximum open circuit output voltage of 9.16 Vrms and a maximum output power of 151.8 μW with 5.51 Vrms output voltage with an optimal resistive load of 200 kΩ from 1 gn acceleration at its resonant frequency of 237. 9 Hz. Source

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