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Guo H.,Shanghai JiaoTong University | Guo H.,National Key Laboratory of Science and Technology on Micro Nano Fabrication Laboratory | Guo H.,Key Laboratory for Thin Film and Micro Fabrication of Ministry of Education | Liu J.,Shanghai JiaoTong University | And 11 more authors.
Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams | Year: 2015

A special microneedle is employed to prepare an ultrafine Ar/O2 atmospheric pressure plasma jet source device. When a high voltage of 4.0 kV is applied to the electrodes, this device can generate stable and almost homogeneous plasma jet, and its line width is on the order of tens of micrometers. Additionally, the ability of ultrafine Ar/O2 plasma jet to selectively remove parylene-C film is also investigated. Experimental results indicate that this ultrafine Ar/O2 plasma jet can effectively remove parylene-C film and the removal rate reaches 2.4 μm/min. Therefore, this Ar/O2 atmospheric pressure plasma jet have the potential of being used to the ultrafine process for future material processing. ©, 2015, Editorial Office of High Power Laser and Particle Beams. All right reserved.


Tian H.-C.,National Key Laboratory of Science and Technology on Micro Nano Fabrication Laboratory | Tian H.-C.,Key Laboratory for Thin Film and Micro Fabrication of Ministry of Education | Tian H.-C.,Shanghai JiaoTong University | Liu J.-Q.,National Key Laboratory of Science and Technology on Micro Nano Fabrication Laboratory | And 23 more authors.
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | Year: 2016

This paper reports a polymer based tubular microelectrode with excellent flexibility for neural or intramuscular implant, which integrated electrical path with fluidic channel. The dimension of electrode site can be regulated precisely by patterns and modified with conducting polymer to improve the electrochemical performance. The excellent flexibility facilitates the implant in dynamic nerve or muscle tissue with the help of hollow syringe needle to undertake electrical stimulation or EMG recording with fluidic drug delivery simultaneously. Moreover, the circumferentially distributed electrode sites facilitate the improvement of spatial selectivity and homogeneous current and potential distribution when applying stimulation. © 2016 IEEE.

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