Fang M.,Central South University |
Fang M.,Key Laboratory for Nonferrous Materials Science and Engineering of Ministry of Education |
Yu Z.-M.,Central South University |
Yu Z.-M.,Key Laboratory for Nonferrous Materials Science and Engineering of Ministry of Education |
And 6 more authors.
Cailiao Kexue yu Gongyi/Material Science and Technology | Year: 2010
Diamond thin films were deposited on beryllia substrates by hot-filament chemical vapor deposition to study the effect of substrate pre-treatment on the thermal properties. The surface details were investigated by metallographic microscope and scanning electronic microscope, while the thermal conductivity of BeO and diamond/BeO was detected by laser-diathermometer. The results show that both of the water-proof abrasive paper and HF pre-treating substrates can improve the continuity of diamond films. When the substrates are eroded by HF for 10 min, the compact and continuous diamond thin film with uniform surface can be obtained, and the thermal conductivity of the composite can be improved by 31.4% compared with original BeO.