Yan C.,Key Laboratory for Micro Nano Technology and System of Liao Ning Province |
Lin Z.,Key Laboratory for Micro Nano Technology and System of Liao Ning Province |
Weijie D.,Dalian University of Technology |
Fei W.,Key Laboratory for Micro Nano Technology and System of Liao Ning Province |
Liding W.,Key Laboratory for Micro Nano Technology and System of Liao Ning Province
Micro and Nano Letters | Year: 2012
This Letter focuses on the piezoelectric microcantilever probe fabrication processes. The sensing layer was lead zirconate titanate (PZT) thin films, prepared by sol-gel process, and formed on the Pt/Ti/SiO 2/Si (100) substrate. The silicon-based microcantilever probe fabrication process is based on the microelectromechanical system technology. The compatible processes make the PZT thin films successfully fabricated on the silicon-based microcantilever. The size of piezoelectric cantilever is 450m in length, 70m in width and 12m in thickness. The spring constant of the cantilever probe is 41.28N/m measured by the micro-force testing system. The first resonance frequency of the cantilever probe is 43.78KHz. The low leakage current of the PZT thin films is 0.265nA with the applied voltage of 1V. The results reveal that the piezoelectric cantilever probe can be substituted for the traditional atomic force microscopy probe. © 2012 The Institution of Engineering and Technology.
Zhang X.,Key Laboratory for Micro Nano Technology and System of Liao Ning Province |
Wang X.,Dalian University of Technology |
Wang X.,Key Laboratory for Micro Nano Technology and System of Liao Ning Province |
Luo Y.,Dalian University of Technology |
And 3 more authors.
2010 International Conference on Mechanic Automation and Control Engineering, MACE2010 | Year: 2010
An improved torque control method - torque/time control method is proposed. The correlation between torque and Pre-tightening force is theoretically analyzed in the bolt joint assembly procedure, from which the equation of the torque and pre-tightening force is acquired in a system of stiffness invariable. When take the slope of torque-time changing and system stiffness of joint parts into consideration, the equation can be used to calculate the controlling torque in accordance with pre-tightening force and finally achieve the accurate control of pre-tightening force. According to the principle above, a mini-bolt joint assembly device and pre-tightening force measurement device was developed. The primary experiment results shows that accurate control of pre-tightening force can be achieved ,while the dispersion of the controlling torque is high to some extent, the dispersion of the Pre-tightening force can still be acquired much low. ©2010 IEEE.
Wang Z.,Dalian University of Technology |
Wang Z.,Key Laboratory for Micro Nano Technology and System of Liao Ning Province |
Chu J.,Dalian University of Technology |
Chu J.,Key Laboratory for Micro Nano Technology and System of Liao Ning Province |
And 2 more authors.
Proceedings of SPIE - The International Society for Optical Engineering | Year: 2011
A wide-field-of-view broad-band spectral filter with polarization function is presented for skylight polarization detection. The designed structure consists of a nanowire grating and a multilayer dielectric band pass filter. The simulation based on the rigorous coupled wave analysis shows that with the optimized uppermost layer of the dielectric filter or the addition of the PMMA layer, the desired integration performance can be achieved. The grating parameters are thoroughly investigated using rigorous coupled wave analysis and effective medium theory. The TM transmission higher than 80% and the extinction over 500 can be achieved in the range of 380nm to 520nm, up to ±35° wide incident angle, and extremely low transmission for both TM and TE polarization in the other spectral range are also obtained. © 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).