Hiratsuka, Japan
Hiratsuka, Japan

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A temperature controller that performs a temperature control on a plurality of temperature adjusters including a reference temperature adjuster to adjust a temperature of a semiconductor wafer includes a setpoint setting section that: sets a temperature detected by a master temperature detector as a control setpoint for a reference one of the temperature adjusters of a master loop, until a temporary setpoint below an actual control setpoint preset as a desired temperature of the semiconductor wafer is reached; and sets the actual control setpoint as the control setpoint for the master loop after the temporary setpoint is reached.


Patent
Kelk Ltd. | Date: 2013-11-07

A circulating cooling/heating device that is configured to cool and heat a circulating fluid supplied to a chamber in plasma-etching equipment includes: a reservoir configured to store the circulating fluid; a pump configured to circulate the circulating fluid between the reservoir and the chamber; a heat exchanger configured to perform heat exchange between the circulating fluid and a cooling water, the heat exchanger being immersed in the circulating fluid stored in the reservoir; and a heater configured to heat the circulating fluid in the reservoir.


Patent
KELK Ltd. | Date: 2013-11-07

A temperature control device includes: a circulating cooling/heating unit cooling and heating a circulating fluid and circulating the circulating fluid relative to a chamber; a controller adjusting a temperature of the circulating fluid to adjust the temperature of the chamber to a temperature setpoint, and a housing for housing the circulating cooling/heating unit and the controller, the housing defining therein a circulation chamber in which the circulating cooling/heating unit is disposed and a control chamber in which the controller is disposed. These chambers are on the same level. A reservoir for storing the circulating fluid, a pump for circulating the circulating fluid, a heat exchanger for cooling the circulating fluid, and a heater for heating the circulating fluid are disposed in the circulation chamber. An inverter for controlling a drive of the pump and an SSR for switching ON/OFF of the heater are disposed in the control chamber.


Patent
Kelk Ltd. | Date: 2014-07-29

A circulating cooling/heating device configured to cool and heat a circulating fluid supplied to a chamber in plasma-etching equipment includes: a heat exchanger configured to perform heat exchange between the circulating fluid and a cooling water; a heater configured to heat the circulating fluid; a pump configured to circulate the circulating fluid between the circulating cooling/heating device and the chamber; a cooling water circulation block through which the cooling water passes; and a pressure sensor serving as a pressure detecting unit configured to detect a pressure of the cooled or heated circulating fluid, the pressure sensor being attached to the cooling water circulation block.


Patent
Kelk Ltd. | Date: 2014-07-29

A fluid heating device for heating chemicals mainly containing sulfuric acid, which is capable of suppressing reduction of heating efficiency even if a fluid mainly containing sulfuric acid is heated, includes a translucent inner tube composed of quartz or the like, a lamp heater disposed in the inner tube, a translucent outer tube disposed outside the inner tube, which is composed of quartz or the like, translucent side plates disposed on both sides of the outer tube, which include quartz or the like, and an amorphous carbon pipe disposed between the outer tube and the inner tube, which functions as a light-absorbing material, wherein the amorphous carbon pipe is disposed so as to be brought into contact with chemicals passing through a space between the outer tube and the inner tube.


Patent
Kelk Ltd. | Date: 2014-07-02

A thermoelectric power module capable of suppressing increase of heat-leakage between a heat exchanger at a higher temperature part and another heat exchanger at a lower temperature part while effectively preventing oxidation of a thermoelectric element, an electrode, and a joint layer for joining the thermoelectric element to the electrode, and preventing a short circuit due to extraneous materials, dew condensation, and so on. The thermoelectric power module includes: a thermoelectric element employing a bismuss-tellurium (BiTe) based thermoelectric material; at least one barrier layer disposed on the thermoelectric element; an electrode; an electrode protection layer disposed at least on one principal surface of the electrode; a solder layer having a side surface formed with a recess, the solder layer joining a first region of the electrode protection layer to the at least one barrier layer; and a coating film disposed on a side surface of the thermoelectric element, a side surface of the at least one barrier layer, and the side surface of the solder layer, the coating film covering a second region adjacent to the first region of the electrode protection layer and being filled into the recess of the solder layer.


Patent
Kelk Ltd. | Date: 2014-08-25

A thermoelectric power module capable of suppressing diffusion of not only a material of a solder layer but also a material of a solder joint layer into a thermoelectric element, or suppressing oxidation of the thermoelectric element. The thermoelectric power module includes in sequence: a thermoelectric element consisting essentially of a thermoelectric material containing at least two kinds of elements of bismuss (Bi), tellurium (Te), antimony (Sb), and selenium (Se) as principal components; a first diffusion prevention layer consisting essentially of at least one of molybdenum (Mo) and tungsten (W); a second diffusion prevention layer consisting essentially of at least one of cobalt (Co), titanium (Ti), and an alloy or compound containing them as principal components; and a solder joint layer consisting essentially of at least one of nickel (Ni), tin (Sn), and an alloy or compound containing them as principal components.


Patent
Kelk Ltd. | Date: 2014-08-25

A thermoelectric power module which can be manufactured without spoiling solderability or joining strength when a thermoelectric element and an electrode are joined to each other by using solder, and in which electric resistance does not largely increase in long time use. The thermoelectric power module includes: a thermoelectric element consisting essentially of a thermoelectric material containing at least two kinds of elements of bismuss, tellurium, antimony, and selenium as principal components; at least one diffusion prevention layer and a solder joint layer disposed in sequence on a surface of the thermoelectric element, the at least one diffusion prevention layer not containing nickel, and the solder joint layer consisting essentially of at least one of nickel, tin, and an alloy or compound containing them as principal components; an electrode; an electrode prevention layer disposed at least on one principal surface of the electrode, and including a film containing nickel as a principal component and having a thickness of 0.2 m to 3.0 m; and a solder layer joining the solder joint layer to a partial area of the electrode prevention layer.


A thermoelectric power generation device includes: a thermoelectric power generation unit; and a transporter capable of moving the thermoelectric power generation unit. A thermoelectric power generation device including a thermoelectric power generation unit that converts heat energy which varies in release state into electric energy to recover the energy can thus be provided in a steel material manufacturing line in which a heat source flows.


Patent
Jfe Holdings and Kelk Ltd. | Date: 2014-03-27

A thermoelectric power generation unit is installed to face a steel material, and installed depending on an output of the thermoelectric power generation unit. A thermoelectric power generation device including a thermoelectric power generation unit that converts heat energy which varies in release state into electric energy to recover the energy can thus be provided in a continuous casting line or slab continuous casting line in which a heat source flows.

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