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Odinokov V.V.,JSC Research Institute of Precision Machine Manufacturing JSC NIITM | Pavlov G.Y.,JSC Research Institute of Precision Machine Manufacturing JSC NIITM | Panin V.V.,JSC Research Institute of Precision Machine Manufacturing JSC NIITM | Raschinsky V.P.,JSC Research Institute of Precision Machine Manufacturing JSC NIITM | And 2 more authors.
Journal of Nano- and Electronic Physics | Year: 2014

A new small-scale vacuum system "MVU TM-Magna 3M" developed at JSC "Research Institute of Precision Machine Manufacturing" is described. Its assembly and working conditions are considered. This system was used for magnetron sputtering multilayer metallic films. © 2014 Sumy State University.

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