Zelenograd, Russia
Zelenograd, Russia

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Novikov A.V.,Mikron JSC | Egorchikov A.E.,Mikron JSC | Dolgov A.N.,Mikron JSC | Gornev E.S.,JCS Molecular Electronics Research Institute | And 3 more authors.
Proceedings of SPIE - The International Society for Optical Engineering | Year: 2016

We have developed the new technology for production of sensitive modules for electrochemical sensors of pressure and acceleration. The technology is applicable for mass production and scalable for high-volume production. In this work we demonstrate the new sensing module for electrochemical motion sensors, and its possibility of applying in geophones. We fabricated prototypes of electrochemical planar transducer chips, produced a laboratory prototype of a geophone based on our planar transducer chip, and tested them. This paper presents the preliminary results of the tests. © 2016 SPIE..


Zaytsev N.,Mikron JSC | Orlov S.,Mikron JSC | Gutchin O.,Mikron JSC | Yanovich S.,Mikron JSC | And 4 more authors.
Proceedings - IVNC 2011: 2011 24th International Vacuum Nanoelectronics Conference | Year: 2011

This paper presents a study of field emission properties of vacuum diodes and triodes with emitters based on nano-graphite-diamond-like films. Nano-graphite-diamond-like film was fabricated as a kind composite of nano-structured film where graphite layer has inclusions of nano-diamond crystallites. The novelty of proposed technical approach is based on nano-graphite-diamond-like components integration into conventional semiconductor wafer processing. Integrated two-electrode (diodes) and three-electrode (triodes) cells with a flat polysilicon electrodes 0.5 μm thick separated by insulating layers of 1.0 μm thick and through holes 2 μm in diameter to provide exposure of the lower electrode were used for emission properties testing. Nano-graphite-diamond-like layers were formed on the surface of the lower electrode. The lower electrode served as the cathode. The upper electrode served as anode. The middle electrode served as the control grid. The study was carried out under vacuum conditions with pressure of 1×10-6 Torr and room temperature (300 K). While investigating auto-emission characteristics it was found that nano-graphite-diamond-like emitters demonstrate emission density up to 2 A/cm2 along with quite low emission threshold voltage about 2.0 V/μm. Potential at the control grid of the triode provides higher emission current density.


Baryshnikova M.V.,Polytechnic University of Mozambique | Filatov L.A.,Polytechnic University of Mozambique | Petrov A.S.,Mikron JSC | Alexandrov S.E.,Polytechnic University of Mozambique
Chemical Vapor Deposition | Year: 2015

This paper describes the results of experimental evaluation of titanium dioxide thin films formed by CVD as active layers in semiconductor, resistive sensors for detection of ethanol vapors. TiO2 layers with a thickness of 90 nm are formed by CVD in the TTIP-O2-O3-Ar reaction system. Sensors manufactured with titania films formed under all the deposition conditions studied exhibit good electrical response to the ethanol vapors, with quick response-recovery characteristics in the temperature range 170-300 °C. Sensor performance is determined by the relative amount of anatase phase and grain size in the films. The response value (Rair/Rethanol) of the sample with the highest degree of crystallinity reached 37 at an operating temperature of 200 °C. An experimental evaluation of TiO2 thin films formed by CVD as active layers in semiconductor, resistive sensors for detection of ethanol vapors. Sensors produced on the basis of titania films containing the highest amount of anatase phase and with the lowest grain size (a typical SEM image is shown) are characterized by highest values of response and shortest response-recovery times. © 2015 Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim.


Smirnov A.,Ivanovo State University of Chemistry and Technology | Efremov A.,Ivanovo State University of Chemistry and Technology | Svettsov V.,Ivanovo State University of Chemistry and Technology | Islyaykin A.,Mikron JSC
Proceedings of SPIE - The International Society for Optical Engineering | Year: 2010

The study of the direct current (dc) glow discharge plasma parameters and active species kinetics in HBr (p=30-250 Pa, i d=10-30 mA) was carried out using the 0-dimensional self-consistent steady-state model. The model included the Boltzmann kinetic equation, the balance equations for both neutral and charge particles, plasma conductivity equation and the quasi-neutrality conditions for volume densities of charged particles as well as for their fluxes to the reactor walls. The final set of cross-sections of electron impact processes for HBr molecules was optimized based on the recent literature data. The data on the steady-state electron energy distribution function, electron gas characteristics (mean energy, drift rate and transport coefficients) and volume-averaged densities of plasma active species were obtained as functions of gas pressure and discharge current. © 2010 Copyright SPIE - The International Society for Optical Engineering.


Kartashov A.D.,Mikron JSC | Krasnikov A.,Mikron JSC | Matyushkin I.,Mikron JSC | Orlov S.,Mikron JSC | And 2 more authors.
ECS Transactions | Year: 2011

Nanostructured diamond films deposited in microwave (MW) plasma enhanced chemical vapor deposition (CVD) process were evaluated as a potential material for cold emitters in autoemission microdiode and microtriode. Graphite-diamond composite film was chosen for further evaluation after initial feasibility study with unpatterned films. Autoemission currents were detected even at normal conditions without vacuum. Measured IV microdiode and microtriode characteristics showed certain aberration from linearity when plotted with Fowler-Northeim coordinates. A model based on consideration of gradual activation of emitting centers is proposed. Emitter surface roughness plays essential role and it is believed to be have the most sufficient impact on Fowler-Northeim IV curves linearity distortion. ©The Electrochemical Society.

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