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Shi Y.-C.,University of Chinese Academy of Sciences | Shi Y.-C.,Joint Laboratory of Electronic Microscope | Li B.,University of Science and Technology Beijing | Li J.-J.,University of Chinese Academy of Sciences | And 13 more authors.
Rengong Jingti Xuebao/Journal of Synthetic Crystals | Year: 2015

Simulation was done based on self-made RF Plasma Jet CVD system to find out the electron temperature and electron density. Then, diamond films were deposited in the system. The plasma was diagnosed by optical emission spectra (OES). The composition, crystalline structure and morphology were characterized by Raman, XRD and SEM, respectively. Ni-N complex was doped into the diamond films by introducing NH3 and Ni-containing organic precursor in the deposition zone. By XPS and PL technique, Ni-N bond energy and photoluminescence were studied, the Ni-N bond and emission peak near 800 nm exist. © 2015, Chinese Ceramic Society. All right reserved.

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