Ding J.,Changzhou University |
Ding J.,Jiangsu Key Laboratory for Solar Cells Materials and Technology |
Zhao Y.,Changzhou University |
Zhao Y.,Jiangsu Key Laboratory for Solar Cells Materials and Technology |
And 10 more authors.
Vacuum | Year: 2011
Computational fluid dynamics (CFD) was employed to investigate the effects of electrode architecture, the arrangement of multi-hollows on the surface of the porous electrode, electrode distance and gas flow rate on the distribution of SiH3 molar fraction. A two-dimensional laminar flow coupled with heat transfer, multi-species chemistry are simultaneously calculated through CFD for improving the spatial distribution of SiH3 in the axis-symmetrical reactor. The spatial distribution of SiH3 can be optimized by means of porous electrode with the gas inlet at the bottom of the chamber, and SiH3 mole fraction varies with the arrangement of holes on porous electrode. The best spatial distribution of SiH3 is obtained at inter electrode distance of 10 mm and more SiH3 can be got at the gas flow rate of 0.5 m/s compared to 0.1, 0.3, 0.8, 1 m/s. © 2011 Elsevier Ltd. All rights reserved.