Instituto Nacional Of Tecnica Aeroespacial Manuel Terradas Inta

Torrejón de Ardoz, Spain

Instituto Nacional Of Tecnica Aeroespacial Manuel Terradas Inta

Torrejón de Ardoz, Spain

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Campanella H.,Institute Microelectronica Of Barcelona Imb Cnm Csic | del Real R.P.,Instituto Nacional Of Tecnica Aeroespacial Manuel Terradas Inta | Duch M.,Institute Microelectronica Of Barcelona Imb Cnm Csic | Serre C.,University of Barcelona | And 6 more authors.
Sensors and Actuators, A: Physical | Year: 2010

Mechanically resonant ferromagnetic MEMS sensors intended for magnetic field gradient measurements are presented. Suspended quad-beams with proof mass have been designed to improve their sensitivity and to simplify the detection. Fabricated devices exhibit the compact size of current MEMS technologies and are built within a simple deep-reactive-ion etching-based process. Nanometer-resolution detection based on optical interferometry and signal processing techniques have been employed to find out dynamic-mode transformation factors of 6.25 × 10-3 T/m/Hz with 0.1-Hz resolution. The device performs in situ gradiometry with a single-sensor structure, which represents a technological advance to current-art gradiometers. © 2010 Elsevier B.V. All rights reserved.


Campanella H.,Institute Microelectronica Of Barcelona Imb Cnm | Del Real R.P.,Instituto Nacional Of Tecnica Aeroespacial Manuel Terradas Inta | Duch M.,Institute Microelectronica Of Barcelona Imb Cnm | Guerrero H.,Instituto Nacional Of Tecnica Aeroespacial Manuel Terradas Inta | And 3 more authors.
Journal of Micromechanics and Microengineering | Year: 2010

Two MEMS structures-a cantilever beam and a quad-beam-have been designed and fabricated through a three-step deep reactive ion etching (DRIE) process. Devices feature target patterns to align with an external optical detection system and a micromachined cavity to embed an NdFeB hard mini-magnet, thus releasing the stress of structures. Structures are intended for magnetostatic gradient measurements. Induced magnetic fields generate an attracting force on the magnet that deflects the sensor. Deflection is optically detected through nanometer-resolution confocal microscopy. The static-mode sensitivity of up to 1.86 × 10-4 T m-1 demonstrates that MEMS gradiometers are able to perform in situ gradiometry with a single sensor and miniaturized size. Suitable techniques for integrated detection are discussed. © 2010 IOP Publishing Ltd.

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