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Gavagnin M.,Institute of Solid State ElectronicsVienna University of TechnologyFloragasse 7 1 E362Vienna | Wanzenboeck H.D.,Institute of Solid State ElectronicsVienna University of TechnologyFloragasse 7 1 E362Vienna | Shawrav M.M.,Institute of Solid State ElectronicsVienna University of TechnologyFloragasse 7 1 E362Vienna | Belic D.,Institute of Solid State ElectronicsVienna University of TechnologyFloragasse 7 1 E362Vienna | And 4 more authors.
Chemical Vapor Deposition | Year: 2014

Magnetic materials synthesized on the nanometer-scale level are essential for several applications, such as spintronics and magnetologic. As a successful nanofabrication approach, focused electron beam-induced deposition (FEBID) stands out as a direct-write technique. FEBID uses an electron beam to locally induce a CVD process, avoiding the use of masks and resists. In this work, Fe-based nanostructures are synthesized on Si(100) by FEBID, starting from iron pentacarbonyl. A systematic variation of FEBID parameters is performed, to study their influence on the geometry and composition of the deposit. Based on the results, specific deposition conditions are suggested for magneto-logic applications and fabrication of large structures. © 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim. Source

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