Institute of NanoEngineering and MicroSystems

Hsinchu, Taiwan

Institute of NanoEngineering and MicroSystems

Hsinchu, Taiwan
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Hsu H.-L.,National Taiwan University | Teng L.-J.,National Chiao Tung University | Chen Y.-C.,Institute of Electronics Engineering | Hsu W.-L.,NTHU | And 6 more authors.
Advanced Materials | Year: 2010

Carbon nanotubes were grown on flexible polylmide substrates at temperatures below 400°C as electrodes for extracellularly neuronal recording. The electrical charge-transfer and electrochemical properties of such CNT electrodes were enhanced by UV-ozone exposure, which induced the formation of C-O, C=O, and O-C=O bonds and reduced the CNT/ electrolyte Interfacial Impedance while increasing the interfacial capacitance. Figure presented © 2010 WILEY-VCH Verlag GmbH & Co. KGaA.


Tseng H.-Y.,Institute of Nanoengineering and Microsystems | Yao D.-J.,Institute of Nanoengineering and Microsystems | Tien C.-H.,Chang Gung Memorial Hospital | Li C.-J.,Chang Gung Memorial Hospital | Huang H.-Y.,Chang Gung Memorial Hospital
IEEE International Conference on Nano/Molecular Medicine and Engineering, NANOMED | Year: 2012

A microfluidic device was designed with two parallel laminar-stream-based surface-modified microchannels to separate motile sperm. This modified sperm sorter provided a new selection that had advances in resolving traditional sorting problems. Microscopic examination showed that sperms with different motility and the results of fluorescence images indicated that the laminar streams are the same as the CFDRC simulation result which revealed distribution of flow field. For the purpose of confirming the real sorting situation, the proportions of living and dead sperm after sorting were readily identified and quantified through use of flow cytometric analysis. Moreover, we present a control microfluidic system to change the flow rate. The controlmicrofluidic system is consists of syringe pump and connective tube module. Decreasing the velocity of flow field provide more opportunities of sorting sperm. The result showed that the sperm collected via our device have higher activity on average. As a result, we can enhance the sorting efficiency in the quality and quantity of sperm. With this approach, the characteristics of laminar flow and a control microfluidic system were utilized to demonstrate the microfluidic system with high efficiency for sperm motility sorting. © 2012 IEEE.


Lee C.-C.,Institute of NanoEngineering and MicroSystems | Hsiao S.-Y.,National Tsing Hua University | Fang W.,Institute of NanoEngineering and MicroSystems | Fang W.,National Tsing Hua University
Journal of Micromechanics and Microengineering | Year: 2010

This paper presents a two-phase liquid micro lens formation technology to implement a polymer micro ball lens. A UV-curable polymer is dispensed into a buffer liquid to form the ball lens. The buffer liquid provides a gravity-free condition so that the ball lens has a highly symmetric shape. The diameter of the ball lens is controlled by the volume of the dispensed polymer. This technology implements either a discrete optical component, or a ball lens integrated with a MEMS (micro electrical mechanical system) structure to form a SiOB (silicon optical bench). To demonstrate the feasibility of this study, ball lenses with diameters ranging from 200 to 600 μm and root mean square (RMS) surface roughness of about 10 nm are fabricated using a commercial UV-curable polymer. The average roundness of a 550 μm diameter ball lens observed from different angles is 3.3 ± 0.4 μm. The peak-to-valley and RMS wavefront errors of a 550 μm diameter ball lens measured by a Mach-Zehnder interferometer are 0.3744 waves (237 nm) and 0.0766 waves (48 nm), respectively. The measured back focal length is about 99 μm, and the associated effective focal length is about 351 μm. The integration of such polymer micro ball lenses with suspended micromachined Si3N4 structures to form the SiOB is also demonstrated. © 2010 IOP Publishing Ltd.


Chang J.-M.,Institute of NanoEngineering and MicroSystems | Chang W.-Y.,National Tsing Hua University | Chen F.-R.,National Tsing Hua University | Tseng F.-G.,Institute of NanoEngineering and MicroSystems | And 2 more authors.
Nanoscale Research Letters | Year: 2013

A single 210-nm Teflon nanoparticle (sTNP) was attached to the vertex of a silicon nitride (Si3N4) atomic force microscope tip and charged via contact electrification. The charged sTNP can then be considered a point charge and used to measure the electrostatic field adjacent to a parallel plate condenser using 30-nm gold/20-nm titanium as electrodes. This technique can provide a measurement resolution of 250/100 nm along the X- and Z-axes, and the minimum electrostatic force can be measured within 50 pN. © 2013 Chang et al.; licensee Springer.


Punde T.H.,Institute of NanoEngineering and MicroSystems | Wu W.-H.,Taiwan Power | Lien P.-C.,National Tsing Hua University | Shih P.-C.,Taiwan Power | And 4 more authors.
Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012 | Year: 2012

We report a 3D biomimetic microsystem which mimics lung microenvironment for monitoring the role of chemokine induced lung inflammation. The extravasation of fibrocytes in response to eosinophil cationic protein (ECP)-stimulated bronchial epithelial cells induced lung inflammation was mimicked on the micro-fluidic chip system for monitoring the microenvironmental changes.


Li M.-H.,National Tsing Hua University | Chen C.-Y.,National Tsing Hua University | Liu C.-Y.,National Tsing Hua University | Li S.-S.,National Tsing Hua University | Li S.-S.,Institute of NanoEngineering and MicroSystems
IEEE Electron Device Letters | Year: 2016

This letter presents the design of a low power, low phase noise monolithic oscillator with a back-end-of-line-embedded CMOS-MEMS resonator. The proposed CMOS-MEMS oscillator consists of a double-ended tuning fork resonator and a high gain (>138 dBΩ) ultra-low input-referred current noise (<25 fA/√Hz) integrator-differentiator transimpedance amplifier (TIA) with sub-150-μW power consumption. The 1.2-MHz CMOS-MEMS oscillator prototype shows the phase noise better than -120 dBc/Hz at 1-kHz offset and -122 dBc/Hz at 10-kHz offset with moderate dc-bias (VP = 22 V). The proposed oscillator can be operated with reduced MEMS dc bias (VP < 7 V) and TIA power supply (VDD < 1.3 V, 65 μW) while maintaining satisfactory performance. The frequency-power-normalized oscillator phase noise figure-of-merit (will be defined later) of 190 dB is achieved at 1-kHz offset with a resonator Q of 1900, which is comparable with the state-of-the-art using bulk-mode resonators possessing Q > 100 k. © 1980-2012 IEEE.


Chen Y.-C.,National Tsing Hua University | Hsu H.-L.,NTHU | Lee Y.-T.,Institute of NanoEngineering and MicroSystems | Su H.-C.,NTHU | And 8 more authors.
Journal of Neural Engineering | Year: 2011

A variety of microelectrode arrays (MEAs) has been developed for monitoring intra-cortical neural activity at a high spatio-temporal resolution, opening a promising future for brain research and neural prostheses. However, most MEAs are based on metal electrodes on rigid substrates, and the intra-cortical implantation normally causes neural damage and immune responses that impede long-term recordings. This communication presents a flexible, carbon-nanotube MEA (CMEA) with integrated circuitry. The flexibility allows the electrodes to fit on the irregular surface of the brain to record electrocorticograms in a less invasive way. Carbon nanotubes (CNTs) further improve both the electrode impedance and the charge-transfer capacity by more than six times. Moreover, the CNTs are grown on the polyimide substrate directly to improve the adhesion to the substrate. With the integrated recording circuitry, the flexible CMEA is proved capable of recording the neural activity of crayfish in vitro, as well as the electrocorticogram of a rat cortex in vivo, with an improved signal-to-noise ratio. Therefore, the proposed CMEA can be employed as a less-invasive, biocompatible and reliable neuro-electronic interface for long-term usage. © 2011 IOP Publishing Ltd.


Chiang M.-C.,Taiwan Power | Hao H.-C.,Institute of NanoEngineering and MicroSystems | Hsiao C.-Y.,NTHU | Liu S.-C.,NTHU | And 4 more authors.
2012 IEEE Nanotechnology Materials and Devices Conference, IEEE NMDC 2012 | Year: 2012

A surface acoustic wave (SAW) sensor array was developed for sensing amino gas. Poly-N-vinylpyrrolidone (PNVP) composite film as a sensitive interface material was deposited onto a 128° YX-LiNbO3 substrate by the spin coating technique. Moreover, we have developed an improved portable electronic noise based on a 2x2 non-continuously working oscillators equipped with coated SAW sensor array. This gas sensor array system consists of SAW sensors, polymers with different polarity of function groups, signal readout electronics with quick connector, miniature sensing chamber made by acrylic, and aluminum plates. The adsorption of amino gas by the sensitive coating material modulates the phase velocity of the acoustic wave due to the mass loading and acoustoelectric effect. Thus, the targeted amino gas can be evaluated by recording the frequency shift of the SAW device. The fast response time (49 s) and recovery time (64 s), and larger frequency response of 800 Hz were observed from the fabricated SAW sensor under 150 ppm concentration of amino gas. The detection response and large frequency shift have been improved under current generation of SAW sensing array system. © 2012 IEEE.


Shen H.-H.,Institute of NanoEngineering and MicroSystems | Su T.-Y.,Institute of NanoEngineering and MicroSystems | Chang H.-Y.,Institute of Molecular Medicine | Yao D.-J.,Institute of NanoEngineering and MicroSystems
2012 IEEE Nanotechnology Materials and Devices Conference, IEEE NMDC 2012 | Year: 2012

This study based on the technique, "Electrowetting on Dielectric (EWOD)," with the micro-heaters designed in EWOD microfluidics system for temperature controlling in biomedical reaction. On this platform, fluorescence magnetic beads (MBs) were used as carriers for single-nucleotide polymorphism (SNP) detection. In human genome, SNPs are responsible for the variations between individuals. The genome of a person comprise specific SNP could result in responsiveness to drug therapies and sensitivity of certain disease. Therefore, SNP is considered as one of the keys to predict the affect in pharmacogenomic medicine. In this study, SNP detection has been demonstrated on this thermal controllable EWOD platform in order to approach the goal of "lab-on-a-chip". © 2012 IEEE.


PubMed | Institute of NanoEngineering and MicroSystems
Type: Journal Article | Journal: Nanoscale research letters | Year: 2013

A single 210-nm Teflon nanoparticle (sTNP) was attached to the vertex of a silicon nitride (Si3N4) atomic force microscope tip and charged via contact electrification. The charged sTNP can then be considered a point charge and used to measure the electrostatic field adjacent to a parallel plate condenser using 30-nm gold/20-nm titanium as electrodes. This technique can provide a measurement resolution of 250/100nm along the X- and Z-axes, and the minimum electrostatic force can be measured within 50 pN. PACS: 07.79.Lh, 81.16.-c, 84.37.+q.

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