Stronski A.,Institute of Semiconductor Physics of Ukraine |
Achimova E.,Institute of Applied Physics AS of Moldova |
Paiuk A.,Institute of Semiconductor Physics of Ukraine |
Abaskin V.,Institute of Applied Physics AS of Moldova |
And 4 more authors.
Journal of Non-Crystalline Solids | Year: 2015
For the first time direct one-step relief formation of holographic grating with the use of amorphous chalcogenide nanomultilayers of new composition based on Ge5As37S58-Se was studied. Amorphous Ge5As37S58-Se nanomultilayers were prepared by cyclic thermal vacuum deposition. Optical constants of Ge5As37S58-Se nanomultilayers, Ge5As37S58 and α-Se films were obtained from transmission spectra. AFM and Raman investigations were performed for morphology and structural characterization on pointed films. Holographic diffraction gratings with diffraction efficiency of 18% in transmission measured at wavelength λ = 650 nm were directly recorded in one step without etching. High quality of grating sinusoidal relief up to ~ 100 nm groove depth was studied by AFM. © 2014 Elsevier Ltd. All rights reserved.