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Lorenzoni M.,Institute Microelectronica Of Barcelona Imb Cnm | Evangelio L.,Institute Microelectronica Of Barcelona Imb Cnm | Nicolet C.,Arkema | Navarro C.,Arkema | And 2 more authors.
Proceedings of SPIE - The International Society for Optical Engineering | Year: 2015

The nanomechanical properties of solvent cast polymer thin films have been investigated using PeakForce™ quantitative nanomechanical mapping. The samples consisted in films of polystyrene and poly(methyl methacrylate) obtained after dewetting of toluene solution on a polymeric brush layer. As a second step, we have probed the mechanical properties of Poly(styrenen- methilmethacrylate) (PS-b-PMMA) block co-polymers (BCP) thin films randomly oriented. The measured films has a critical thickness below 50 nm and present features to be resolved of less than 42 nm. Measured surface elastic modulus obtained present a good agreement with previous literature and show how PeakForce technique could be crucial to BCP investigation predicting the mechanical stability of the different phases. © 2015 SPIE.


Lorenzoni M.,Institute Microelectronica Of Barcelona Imb Cnm | Evangelio L.,Institute Microelectronica Of Barcelona Imb Cnm | Nicolet C.,Arkema | Navarro C.,Arkema | And 3 more authors.
Journal of Micro/ Nanolithography, MEMS, and MOEMS | Year: 2015

The nanomechanical properties of solvent-cast polymer thin films have been investigated using PeakForce™ Quantitative Nanomechanical Mapping. The samples consisted of films of polystyrene (PS) and poly(methyl methacrylate) (PMMA) obtained after the dewetting of toluene solution on a polymeric brush layer. Additionally, we have probed the mechanical properties of poly(styrene-b-methyl methacrylate) block copolymers (BCP) as randomly oriented thin films. The probed films have a critical thickness <50 nm and present features to be resolved <42 nm. The Young's modulus values obtained through several nanoindentation experiments present a good agreement with previous literature, suggesting that the PeakForce™ technique could be crucial for BCP investigations, e.g., as a predictor of the mechanical stability of the different phases. © 2015 Society of Photo-Optical Instrumentation Engineers (SPIE).


Parra-Borderias M.,CSIC - National Institute of Aerospace Technology | Fernandez-Martinez I.,Institute Microelectronica Of Madrid Csic | Fernandez-Martinez I.,Technical University of Madrid | Fabrega L.,CSIC - Institute of Materials Science | And 7 more authors.
IEEE Transactions on Applied Superconductivity | Year: 2013

The first dark characterization of a thermometer fabricated with our Mo/Au bilayers to be used as a transition edge sensor is presented. High-quality, stress-free Mo layers, whose thickness is used to tune the critical temperature (TC) down to 100 mK, are deposited by sputtering at room temperature (RT) on Si3N4 bulk and membranes, and protected from degradation with a 15-nm sputtered Au layer. An extra layer of high-quality Au is deposited by ex situ e-beam to ensure low residual resistance. The thermometer is patterned on a membrane using standard photolithographic techniques and wet etching processes, and is contacted through Mo paths, displaying a sharp superconducting transition (α 600). Results show a good coupling between Mo and Au layers and excellent TC reproducibility, allowing to accurately correlate dMo and TC. Since d Au is bigger than \xiM for all analyzed samples, bilayer residual resistance can be modified without affecting TC. Finally, first current to voltage measurements at different temperatures are measured and analyzed, obtaining the corresponding characterization parameters © 2011 IEEE.


Gonzalez-Arrabal R.,Technical University of Madrid | Redondo-Cubero A.,Autonomous University of Madrid | Redondo-Cubero A.,Technical University of Madrid | Gonzalez Y.,Institute Microelectronica Of Madrid Csic | And 2 more authors.
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | Year: 2011

The lattice order degree and the strain in as-grown, Mn-implanted and post-implanted annealed InAs thin films were investigated with depth resolution by means of Rutherford backscattering spectrometry in channeling conditions (RBS/C). Three main crystallographic axes were analyzed for both In and As sublattices. The behaviour of the induced defects was evaluated in two regions with different native defects: the interface and the surface. The results show that Mn implantation and post-implantation annealing are anisotropic processes, affecting in a different way the In and As sublattices. The mechanisms influencing the enhancement and deterioration of the crystal quality during the implantation are discussed in relation to the as-grown defects and the segregation of the elements. © 2011 Elsevier B.V. All rights reserved.


Losilla N.S.,Institute Microelectronica Of Madrid Csic | Martinez J.,Institute Microelectronica Of Madrid Csic | Bystrenova E.,CNR Institute of Nanostructured Materials | Greco P.,CNR Institute of Nanostructured Materials | And 2 more authors.
Ultramicroscopy | Year: 2010

Sequential and parallel local oxidation nanolithographies have been applied to pattern pentacene samples by creating a variety of nanostructures. The sequential local oxidation process is performed with an atomic force microscope and requires the application of a sequence of voltage pulses of 36V for 1ms. The parallel local oxidation process is performed by using a conductive and patterned stamp. Then, a voltage pulse is applied between the stamp and the pentacene surface. Patterns formed by arrays of parallel lines covering 1mm2 regions and with a periodicity of less than 1γm have been generated in a few seconds. We also show that the patterns can be used as templates for the deposition of antibodies. © 2010 Elsevier B.V.

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