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Kamp-Lintfort, Germany

Rohland M.,Physikalisch - Technische Bundesanstalt | Rohland M.,Institute For Mikrotechnik | Arz U.,Physikalisch - Technische Bundesanstalt | Kuhlmann K.,Physikalisch - Technische Bundesanstalt | Buttgenbach S.,Institute For Mikrotechnik
Advances in Radio Science | Year: 2012

We present a transition from a contact structure built on highly-conductive silicon to a coplanar waveguide (CPW) fabricated in membrane technology. Test structures were fabricated and measured. The silicon-to-membrane transition is suitable for on-wafer probing and provides less than - 10 dB measured reflection in the frequency range from 1 to 110 GHz. Measured and calculated values of the propagation constant of the membrane CPW agree well in the entire frequency range. © 2012 Author(s). Source


Arz U.,Physikalisch - Technische Bundesanstalt | Rohland M.,Physikalisch - Technische Bundesanstalt | Rohland M.,Institute For Mikrotechnik | Kuhlmann K.,Physikalisch - Technische Bundesanstalt | Buttgenbach S.,Institute For Mikrotechnik
2011 IEEE 20th Conference on Electrical Performance of Electronic Packaging and Systems, EPEPS-2011 | Year: 2011

In this paper we present an optimized interconnect structure which allows for the accurate broadband characterization of coplanar waveguides (CPWs) built in membrane technology. For both the membrane CPW and the silicon part of the interconnect structure, we compare measurements against calculations, and, where available, also against full-wave simulations. The agreement for the membrane CPW part is very good over a frequency range of 110 GHz. In addition, we detect a tangible sensitivity of the broadband propagation characteristics to the relative permittivity of the membrane material for both parts of the interconnect structure. © 2011 IEEE. Source


Rohland M.,Physikalisch - Technische Bundesanstalt | Rohland M.,Institute For Mikrotechnik | Arz U.,Physikalisch - Technische Bundesanstalt | Buttgenbach S.,Institute For Mikrotechnik
Advances in Radio Science | Year: 2011

In this work we compare on-wafer calibration standards fabricated in membrane technology with standards built in conventional thin-film technology. We perform this comparison by investigating the propagation of uncertainties in the geometry and material properties to the broadband electrical properties of the standards. For coplanar waveguides used as line standards the analysis based on Monte Carlo simulations demonstrates an up to tenfold reduction in uncertainty depending on the electromagnetic waveguide property we look at. © 2011 Author(s) CC Attribution 3.0 License. Source


Arz U.,Physikalisch - Technische Bundesanstalt | Rohland M.,Physikalisch - Technische Bundesanstalt | Rohland M.,Institute For Mikrotechnik | Kuhlmann K.,Physikalisch - Technische Bundesanstalt | Buttgenbach S.,Institute For Mikrotechnik
2012 IEEE 16th Workshop on Signal and Power Integrity, SPI 2012 - Proceedings | Year: 2012

In this paper we characterize broadband low-loss interconnects built in membrane technology on highly-resistive silicon (HRSi) substrates. Test structures were fabricated and measured in a frequency range from 0.1 to 110 GHz. The measured propagation constant of the membrane CPW part of the interconnect agrees well with analytical calculations in the entire frequency band. © 2012 IEEE. Source


Arz U.,Physikalisch - Technische Bundesanstalt | Rohland M.,Physikalisch - Technische Bundesanstalt | Rohland M.,Institute For Mikrotechnik | Buttgenbach S.,Institute For Mikrotechnik
76th ARFTG Microwave Measurement Conference: Millimeter-Wave Measurements and Modeling, ARFTG 2010 | Year: 2010

In this paper we discuss the advantages of on-wafer calibration standards fabricated in membrane technology in comparison to standards built in conventional thin-film technology. Based on Monte Carlo simulations we investigate the propagation of uncertainties in the geometry and material properties to the broadband electrical properties of the standards. For coplanar waveguides used as line standards we demonstrate that, depending on the electromagnetic waveguide property we look at, an up to tenfold reduction in uncertainty can be achieved. ©2010 IEEE. Source

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