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Saito N.,University of Miyazaki | Fujita M.,University of Miyazaki | Nakaaki I.,Shizuoka Industrial Research Institute of Shizuoka Prefecture | Yamawaki S.,University of Miyazaki | Nishioka K.,University of Miyazaki
Journal of Non-Crystalline Solids | Year: 2013

Hydrogenated silicon-carbon alloy (SiC:H) films were deposited by reactive RF magnetron sputtering of Si in methane-argon gas mixtures. As a second sputtering gas, helium was used to control the film properties. The effect of the partial pressure ratio (R) of He to the total sputtering gas on the structural, optical, and electrical properties of the films was investigated. At R values above 70%, the bonding configuration observed in the IR spectra changed, the optical band gap decreased, and the DC conductivity clearly increased. These observations imply an increase in structural disorder after introducing a high R of He during the sputtering process. In order to overcome the negative effects on the properties of films deposited under high R values, the possibility of micro-crystallization in an amorphous structure was examined by introducing H2 instead of He. © 2013 Elsevier B.V.


Saito N.,University of Miyazaki | Nakaaki I.,Shizuoka Industrial Research Institute of Shizuoka Prefecture | Nishioka K.,University of Miyazaki
Thin Solid Films | Year: 2012

Ni-Cr oxide thin films were prepared by magnetron sputtering of a NiO-Cr 2O 3 (1:1 mol ratio) composite target. In addition to argon, oxygen was used as a reactive sputtering gas. The dependence of the partial pressure ratio (R) of oxygen to the total sputtering gas on the structural and electrical properties of the films was investigated. With an increase in R, the intensity of the X-ray diffraction peaks as associated with the Ni-O crystal structure increased and the resistivity of the films decreased. From the viewpoint of applying these films to infrared sensors, their thermistor constant B obtained from their temperature dependence of resistivity was examined. B tended to increase with R. Relatively low resistivity values and high B values were obtained in the range of R around 8%. © 2011 Elsevier B.V. All rights reserved.


Okajima Y.,University of Shizuoka | Yamamoto A.,University of Shizuoka | Sudoh M.,University of Shizuoka | Sakai S.,Shizuoka Industrial Research Institute of Shizuoka Prefecture | Matsumoto Y.,Shizuoka Industrial Research Institute of Shizuoka Prefecture
Electrochemistry | Year: 2011

Hydrogen gas reformed from the biogas has recently been paid attention particularly from the point of view of environmental protection. In order to investigate the effect of the biogas on a polymer electrolyte membrane fuel cell, the cell performances using CO2 containing gas as anode gas were measured by fuel cell experiments and cyclic voltammetry. The membrane-electrolyte assemblies were manufactured with a Pt or PtRu catalyst and Nafion 117 or Nafion 212, and some electrodes were loaded with a Nafion solution. As a result, it was found that the presence of coexisting CO 2 gas decreased the cell performance, while PtRu suppressed the negative effect. In the case of Nafion 212, which was a thinner membrane than Nafion 117 used as the electrolyte, it was more sensitive to the presence of CO2. It was found that the cathode catalyst in the cell was also poisoned by the crossovered CO2.

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