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Long S.,Huadong Photoelectric Integrated Device Research Institute | Liu Y.,Huadong Photoelectric Integrated Device Research Institute | He K.,Huadong Photoelectric Integrated Device Research Institute | Tang X.,Huadong Photoelectric Integrated Device Research Institute | Chen Q.,Nanjing University of Science and Technology
Journal of Semiconductors | Year: 2014

A high stability in-circuit reprogrammable technique control system for a capacitive MEMS accelerometer is presented. Modulation and demodulation are used to separate the signal from the low frequency noise. A low-noise low-offset charge integrator is employed in this circuit to implement a capacitance-to-voltage converter and minimize the noise and offset. The application-specific integrated circuit (ASIC) is fabricated in a 0.5 μm one-ploy three-metal CMOS process. The measured results of the proposed circuit show that the noise floor of the ASIC is -116 dBV, the sensitivity of the accelerometer is 66 mV/g with a nonlinearity of 0.5%. The chip occupies 3.5 × 2.5 mm2and the current is 3.5 mA. © 2014 Chinese Institute of Electronics.

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