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For manufacturing a radiation window for an X-ray measurement apparatus, an etch stop layer (102) is first produced on a polished surface of a carrier (101). A thin film deposition technique is used to produce a boron carbide layer (103) on an opposite side of said etch stop layer (102) than said carrier (101). The combined structure comprising said carrier (101), said etch stop layer (102), and said boron carbide layer (103) is attached to a region around an opening (104) in a support structure (105) with said boron carbide layer (103) facing said support structure (105). The the middle area of carrier (101) is etched away, leaving an additional support structure (101A).


For manufacturing a radiation window for an X-ray measurement apparatus, an etch stop layer is first produced on a polished surface of a carrier. A thin film deposition technique is used to produce a boron carbide layer on an opposite side of the etch stop layer than the carrier. The combined structure including the carrier, the etch stop layer, and the boron carbide layer is attached to a region around an opening in a support structure with the boron carbide layer facing the support structure. The middle area of carrier is etched away, leaving an additional support structure.


Torma P.T.,Aalto University | Sipila H.J.,Heikki Sipila Oy | Mattila M.,Aalto University | Kostamo P.,HS Foils Oy | And 7 more authors.
IEEE Transactions on Nuclear Science | Year: 2013

We have demonstrated the fabrication of ultra-thin Si fine grid supported silicon nitride X-ray windows. These X-ray windows exhibit unequaled transmission of soft X-rays, high strength and excellent thermal stability. Measured soft X-ray transmission performance is significantly enhanced compared to typical polymer or beryllium based X-ray window structures. A double sided grid structure is used to demonstrate the scaling of the technology to larger areas. © 1963-2012 IEEE.


Torma P.T.,HS Foils Oy | Sipila H.J.,HS Foils Oy | Koskinen T.,HS Foils Oy | Mattila M.,HS Foils Oy
Spectrochimica Acta - Part B Atomic Spectroscopy | Year: 2016

X-ray spectroscopy instruments lose part of their performance due to the lack of suitable components for soft X-ray region below 1 keV. Therefore, in the analysis of low atomic number elements including lithium, beryllium, boron and carbon instrument sensitivity is often limited. In this work we describe how the performance of the spectroscopy of soft X-rays is significantly improved when all devices integrated in the spectroscopic instrument are suitable for both soft and hard X-rays. This concept is based on utilizing ultra-thin SiN X-ray windows with proven performance not only as a detector window but also as an X-ray source window. By including a soft-X-ray-sensitive silicon drift detector with efficient surface charge collection in this concept the sensitivity and performance of the instrument is significantly increased. © 2016 Elsevier B.V. All rights reserved.


Torma P.T.,HS Foils Oy | Kostamo J.,HS Foils Oy | Sipila H.,HS Foils Oy | Mattila M.,HS Foils Oy | And 9 more authors.
IEEE Transactions on Nuclear Science | Year: 2014

The spectral transmittance of a new generation of SiN based X-ray windows is characterized. The windows are strengthened by low aspect-ratio support grid. As expected for this unprecedented thin window material, the transmittance in the soft X-ray spectral region outperforms the present technologies. A detailed study of the various performance properties of the fabricated SiN X-ray windows is presented. Besides their high transmittance, the windows also have high uniformity, high mechanical strength and good leak tightness. The windows can withstand temperatures from cryogenic range to approximately 250°C. SiN foils are the first real nanotechnology-based choice for the practical realization of X-ray windows and bring the performance to a level that only nanotechnology can offer. © 2014 IEEE.


Patent
Hs Foils Oy | Date: 2012-02-15

In a method for manufacturing a radiation window there is produced a layered structure where an etch stop layer exists between a carrier and a solid layer. A blank containing at least a part of each of the carrier, the etch stop layer, and the solid layer is attached to a radiation window frame. At least a part of what of the carrier was contained in the blank is removed, thus leaving a foil attached to the radiation window frame, wherein the foil contains at least a part of each of the etch stop layer and the solid layer.


Patent
Hs Foils Oy | Date: 2010-10-08

For manufacturing a radiation window for an X-ray measurement apparatus, and etch stop layer is first produced on a polished surface of a carrier. A thin film deposition technique is used to produce a structural layer on an opposite side of said etch stop layer than said carrier. The combined structure comprising said carrier, said etch stop layer, and said structural layer is attached to a region around an opening in a support structure with said structural layer facing said support structure. The carrier is etched away.


A radiation window foil is provided for an X-ray radiation window. It includes a continuous window layer with a first side and a second side. A first mesh or grid layer is stacked on or bonded to the first side of the continuous window layer. A second mesh or grid layer is stacked on or bonded to the second side of the continuous window layer.


A radiation window foil for an X-ray radiation window comprises a mesh that defines a number of openings (902), said mesh having a first side surface (903) and a second side surface (904). A layer (906) spans said openings. Said layer (906) is on the first side of the mesh but spans said openings at a level closer to the second side surface (904) of the mesh than the first side surface (903) of the mesh.

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