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Wang H.M.,G450C | Wang H.M.,Globalfoundries | Kobata I.,Ebara Corporation | Ishibashi T.,Ebara Corporation | And 2 more authors.
2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2016 | Year: 2016

A 450mm CMP tool is installed, calibrated, and process qualified on oxide CMP process before the STI, W, and Cu processes can be evaluated. With the new multi-area polishing heads, the oxide removal rates ∼ 1800 Å/min and the WIWNU% (3σ) ≤ 8% within the same polish table can be achieved with a fumed-silica based slurry on a traditional IC pad as the first trial. A small baseline of wafer run is performed on each process table and the WTW (wafer-to-wafer) and HTH (head-to-head) removal rate variations are then calculated. In each polish table, sufficient WTW removal rate variation were obtained and current best WTWNU(3σ) was 1.1%. The tuning of removal rates on each Head/Polish table can be achieved with the manufacturer's advanced technologies, based on the signals and parameters pulled from the tool during processing. These signals and parameters allow process engineers to check if the wafers are processed at the similar conditions on the polishing pads. Polish behaviors of different silica based slurries, fumed & colloidal silica, on the same polishing pad are compared. More process results on STI application will be shown in the final paper, mainly on 450mm blanket monitor wafers. © 2016 IEEE.

Home > Press > Thousands Visit SUNY Polytechnic Institute Sites in Albany, Utica, and Rochester for Annual Community Day Activities: Signature ‘NANOvember’ event highlights New York State’s pioneering nanotechnology-centered corridor as part of the eighth annual month-long celebration Abstract: Demonstrating extensive and sustained interest in Governor Andrew M. Cuomo’s high-tech investment strategy which has made New York State a global leader in technology innovation, SUNY Polytechnic Institute announced that thousands attended Community Day events at its locations in Albany, Utica, and Rochester, representing a ten percent increase from last year’s Community Day attendance. The eighth annual event featured 160 faculty, staff, and student volunteers in total supporting the traditional start to “NANOvember,” a month-long series of statewide engagements that demonstrate the inspiring world of nanotechnology and the global leadership of SUNY Poly and New York in this exciting field. "SUNY Poly’s Community Day is an engaging event that serves growing public interest in the nanosciences as well as the educational opportunities and career prospects the field presents," said SUNY Chancellor Nancy L. Zimpher. "As in years past, Community Day has been a sweeping success, highlighting the many opportunities that SUNY Poly makes available for students, faculty, staff, and businesses. Congratulations to Dr. Kaloyeros and the entire SUNY Poly community on this event.” “SUNY Polytechnic Institute is thrilled to offer these “NANOvember” events and share the story of Governor Andrew Cuomo’s successful public-private investment model, which has catalyzed billions of dollars in investment across New York State and thousands of jobs, with SUNY Poly as a magnet for leading businesses that have made New York’s innovation ecosystem their home,” said SUNY Poly President and CEO Dr. Alain Kaloyeros. “As people of all ages take part in NANOvember-themed events throughout this month, we hope that they will be inspired and excited by how the Governor’s nanotechnology-centered economic strategy is powering exciting growth and development.” At SUNY Polytechnic Institute’s $24 billion Albany NanoTech Complex, Community Day featured a wide range of family-friendly activities, allowing visitors to explore vanishing jelly marbles, the principles of levitation, and take part in gowning demonstrations, fabricate Buckyballs, create play dough, and make bouncing balls. Attendees were provided guided tours of NanoFab Xtension (NFX), headquarters for the Global 450mm Consortium (G450C), which is leading the world in the development of next-generation computer chips, to see first-hand the powerful educational and workforce opportunities that stem from Governor Cuomo’s targeted investments across the state. The Albany event was accompanied by a similar event held simultaneously at SUNY Poly’s Utica site, where visitors learned about Governor Cuomo’s $1.5 billion ‘Nano Utica’ announcement. Attendees were able to tour the Computer Chip Commercialization Center (Quad-C), which will be home to a power electronics packaging facility led by SUNY Poly and GE. They also learned about sensor maker ams’ $2 billion Marcy Nanocenter plans that will establish a state-of-the-art 200/300 mm wafer fabrication facility to support the company’s high-performance analog semiconductor operations which are expected to create and retain more than 700 full time jobs and 500 additional support jobs. Visitors to SUNY Poly’s Utica site were also able to take part in a number of fun, hands-on nanotechnology-based activities and presentations to better understand the science behind regional and statewide nano-based growth. As part of the kickoff to NANOvember, students from the Finger Lakes region were also invited to tour the SUNY Poly Smart System Technology & Commercialization Center (SUNY Poly STC) in Canandaigua on November 6 to see demonstrations of the facility’s world-class micro-electro-mechanical systems (MEMS) capabilities to better understand numerous career opportunities that are available to them. Students from Pittsford Mendon High School and Pittsford Sutherland High School attended the nanoscience-focused, daylong event. NANOvember will continue with The Entrepreneurship Forum, hosted by SUNY Poly and the Energy and Environmental Technology Applications Center (E2TAC), which will provide critical information and valuable connections for startup businesses, enabling them to connect with client companies and advisory members of Incubators for Collaborating & Leveraging Energy and Nanotechnology (iCLEAN) and the Tech Valley Business Incubator on November 12; “SUNY Poly CMOST Family Day” at the SUNY Poly Children’s Museum of Science and Technology (SUNY Poly CMOST), where children will be able to experience age-appropriate nanotechnology exhibits and other engaging, family-based activities that will allow them to explore the science behind Star Wars on November 14; and 300 middle and high school students will take part in an immersive nanotechnology-inspired program as part of SUNY Poly’s popular “NanoCareer Day,” where attendees learn about the many high-tech career opportunities available throughout New York’s high-tech corridor on November 25. Additionally, “An Evening of Q & A with Dr. Alain Kaloyeros, SUNY Poly President and CEO,” is scheduled to take place at the SUNY Poly Albany site on November 16 when he will discuss nanotechnology’s growing impact on New York State—and societies around the globe—as a result of Governor Cuomo’s high-tech growth strategy. For a complete list of events and activities planned for NANOvember, along with pre-registration, please visit www.sunycnse.com/NANOvember.aspx. About SUNY Polytechnic Institute SUNY Polytechnic Institute (SUNY Poly) is New York’s globally recognized, high-tech educational ecosystem, formed from the merger of the SUNY College of Nanoscale Science and Engineering and SUNY Institute of Technology. SUNY Poly offers undergraduate and graduate degrees in the emerging disciplines of nanoscience and nanoengineering, as well as cutting-edge nanobioscience and nanoeconomics programs at its Albany location and undergraduate and graduate degrees in technology, including engineering, cybersecurity, computer science, and the engineering technologies; professional studies, including business, communication, and nursing; and arts and sciences, including natural sciences, mathematics, humanities, and social sciences at its Utica/Rome location. Thriving athletic, recreational, and cultural programs, events, and activities complement the campus experience. As the world’s most advanced, university-driven research enterprise, SUNY Poly boasts more than $43 billion in high-tech investments, over 300 corporate partners, and maintains a statewide footprint. The 1.3 million-square-foot Albany NanoTech megaplex is home to more than 4,000 scientists, researchers, engineers, students, faculty, and staff, in addition to Tech Valley High School. SUNY Poly operates the Smart Cities Technology Innovation Center (SCiTI) at Kiernan Plaza in Albany, the Solar Energy Development Center in Halfmoon, the Children’s Museum of Science and Technology (CMOST) in Troy, the Central New York Hub for Emerging Nano Industries in Syracuse, the Smart System Technology and Commercialization Center (STC) in Canandaigua, and the Photovoltaic Manufacturing and Technology Development Facility in Rochester where SUNY Poly also leads the American Institute for Manufacturing Integrated Photonics. SUNY Poly founded and manages the Computer Chip Commercialization Center (Quad-C) at its Utica location and also manages the $500 million New York Power Electronics Manufacturing Consortium, with nodes in Albany and Rochester, as well as the Buffalo High-Tech Manufacturing Innovation Hub at RiverBend, Buffalo Information Technologies Innovation and Commercialization Hub, and Buffalo Medical Innovation and Commercialization Hub. For information visit www.sunycnse.com and www.sunypoly.edu. For more information, please click If you have a comment, please us. Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Yu B.,G450C | Yu B.,TSMC | Ku F.,G450C | Ku F.,TSMC | And 9 more authors.
ECS Transactions | Year: 2013

Wafer size transition from 300mm to 450mm has been started to address the higher manufacturing cost issue. Major challenges for front end of line (FEOL) clean are listed. From preliminary results, cleanness and etching uniformity are very positive with comparable or even better particle adder performance. Pattern collapse and damage become more and more critical to advanced technology node, but currently they couldn't be tested due to the lack of 450mm pattern wafer. For 450mm wafer recycling, it will be done in single wafer processing tool instead of batch tool, good results in terms of short process time and low surface roughness were obtained on SiO2 and Si3N 4 recycling wafers. Same as 300mm, single wafer processing tool for Si3N4 wet etching is requested. © The Electrochemical Society.

Maynes A.,G450C | Robertson F.,G450C
Solid State Technology | Year: 2014

Design and construction professionals are showing unprecedented levels of collaboration through the Facilities 450mm Consortium (F450C). The facilities-focused off-shoot of the Global 450mm Consortium has provided the unified forum to test and analyze utility requirements, overhead conveyance systems and energy-efficiency strategies. The Global 450mm Consortium (G450C), a New York-based public/private program with leadership from GLOBAL- FOUNDRIES, IBM, Intel, Samsung, TSMC and the College of Nanoscale Science and Engineering is housed on SUNY's University at Albany campus and maintains focus on 450mm process and equipment development. The purpose of the 450mm fab is to manufacture more advanced integrated circuits at lower cost with a lighter environmental footprint. The facility experts involved in establishing and implementing 450mm infrastructure requirements are facing a similar degree of challenges as the integrated circuit and equipment manufacturers.

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