Kita-ku, Japan
Kita-ku, Japan

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Provided are a fixing device for a lower-stage member which facilitates a leveling operation for making upper surfaces of lower-stage members coplanar, and can further enhance a vibration absorbing effect generated by an elastic member, and a fluid control device which includes the fixing device. A fixing device for a lower-stage member is configured such that respective lower-stage members (2) are fixed once and, thereafter, a desired lower-stage member (2) is moved upwardly against an elastic force (21) so as to finely adjust positions of upper surfaces of a plurality of lower-stage members (2). The elastic member (21) is formed of an annular body made of rubber or a synthetic resin. A cutout (21a, 21b) which imparts the elastic deformation by bending when a force in the vertical direction is applied to the elastic member (21) is formed on an upper portion and a lower portion of an inner peripheral surface of the elastic member (21).


A flat portion of a bottom surface of a depression of a body is provided with a spot facing so as to include a portion of a fluid outflow channel, which portion is open to the bottom surface of the depression.


Patent
Tokyo Electron and Fujikin Incorporated | Date: 2016-10-10

A bolt-locking apparatus includes a plurality of fitting members 2 and 3 which are relatively non-rotatably fitted to heads of a plurality of bolts 5, and an engaging member 4 fitted to the plurality of fitting members 2 and 3 such that the engaging member 4 straddles the fitting members 2 and 3. Outer peripheral surfaces 2b and 3b of the fitting members 2 and 3 are non-circular in shape. The engaging member 4 includes a plurality of engaging holes (non-circular engaging portions) 8a and 8b which correspond to the non-circular outer peripheral surfaces 2b and 3b of the plurality of fitting members 2 and 3.


The pressure-type flow control device includes: a main body provided with a fluid channel communicating between a fluid inlet and a fluid outlet and an exhaust channel communicating between the fluid channel and an exhaust outlet; a pressure control valve fixed to a fluid inlet side of the main body for opening or closing the upstream side of the fluid channel; a first pressure sensor for detecting the internal pressure of the fluid channel on the downstream side of the control valve; an orifice provided in the fluid channel on the downstream side of the point of branching of the exhaust channel; an on/off valve for opening or closing the fluid channel on the downstream side of the first pressure sensor; and an exhaust valve for opening or closing the exhaust channel.


Patent
Fujikin Incorporated | Date: 2016-06-21

A pressure type flow control system with flow monitoring includes an inlet side passage, a control valve comprising a pressure-type flow control unit connected downstream of the inlet side passage, a thermal-type flow sensor connected downstream of the control valve, an orifice installed on a fluid passage connected downstream of the thermal-type flow sensor, a temperature sensor provided near the fluid passage between the control valve and orifice, a pressure sensor provided for the fluid passage between the control valve and orifice, an outlet side passage connected to the orifice, and a control unit comprising a pressure-type flow rate arithmetic and control unit to which a pressure signal from the pressure sensor and a temperature signal from the temperature sensor are input, and which computes a flow rate value of fluid flowing through the orifice, and outputs a control signal to a valve drive unit of the control valve.


Patent
Fujikin Incorporated, Tohoku University and Tokyo Electron | Date: 2015-02-19

A pressure type flow rate control apparatus is provided wherein flow rate of fluid passing through an orifice is computed as Qc=KP1 (where K is a proportionality constant) or as Qc=KP2^(m )(P1P2)^(n )(where K is a proportionality constant, m and n constants) by using orifice upstream side pressure P1 and/or orifice downstream side pressure P2. A fluid passage between the downstream side of a control valve and a fluid supply pipe of the pressure type flow rate control apparatus comprises at least 2 fluid passages in parallel, and orifices having different flow rate characteristics are provided for each of these fluid passages, wherein fluid in a small flow quantity area flows to one orifice for flow control of fluid in the small flow quantity area, while fluid in a large flow quantity area flows to the other orifice for flow control of fluid in the large flow quantity area.


Patent
Fujikin Incorporated, Tohoku University and Tokyo Electron | Date: 2016-06-02

A pressure type flow rate control apparatus is provided wherein flow rate of fluid passing through an orifice is computed as Qc=KP1 (where K is a proportionality constant) or as Qc=KP2^(m)(P1P2)^(n) (where K is a proportionality constant, m and n constants) by using orifice upstream side pressure P1 and/or orifice downstream side pressure P2. A fluid passage between the downstream side of a control valve and a fluid supply pipe of the pressure type flow rate control apparatus comprises at least 2 fluid passages in parallel, and orifices having different flow rate characteristics are provided for each of these fluid passages, wherein fluid in a small flow quantity area flows to one orifice for flow control of fluid in the small flow quantity area, while fluid in a large flow quantity area flows to the other orifice for flow control of fluid in the large flow quantity area.


A valve device has a valve main body and a tube fitting that has an air passage for supplying operation air into the valve main body. An upper lid portion of a cap is formed with a fitted hole provided with a projection. The tube fitting has a fitting portion to be fitted into the upper lid portion. The fitting portion is formed with, on an outer circumference thereof, a fitting groove to which the projection is fitted, and has a tip end portion located closer to a tip end side than the fitting groove.


Patent
Fujikin Incorporated | Date: 2015-02-06

Provided is a cap for a handwheel that opens and closes a valve, capable of being readily attached to the handwheel without requiring a large space around the handwheel. The cap has easily switchable two working modes: One is a co-rotation mode where the cap is capable of rotating with the handwheel and the other is an independent rotation mode where the cap is capable of rotating independently of the handwheel. The cap has an internal casing to be securely fitted to the handwheel; an external casing being rotatable around its axis and having the internal casing in an interior thereof; a clutch for connecting the external casing with the internal casing and for disconnecting the former from the latter; and a maintaining member for keeping the external casing rotatable independently of the internal casing when they are disconnected by the clutch.


Patent
Fujikin Incorporated and Toyota Motor Corporation | Date: 2015-12-02

A safety valve mounted on a container and configured to release gas in a container in the case where the temperature rises, in which the safety is secured and a cost reduction is achieved. A movable body 12 includes a shaft portion 21 on which a compression coil spring 13 is fitted and a flange portion 22 configured to come into contact with a fusible alloy 11 by being urged by the compression coil spring 13 . The flange portion 22 of the movable body 12 is provided with through holes 35 configured to discharge the fused fusible alloy 11 into a compression coil spring arrangement space 30.

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