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Chaska, MN, United States

Butterbaugh J.W.,FSI International
Solid State Technology | Year: 2012

Yield advantages gained by leveraging the high particle removal efficiency (PRE) of cryogenic aerosol inserted in the BEOL after in-line testing, without altering substrate properties, are discussed. Unlike wet technology, dry cryogenic aerosol technology cleans substrates without concern for film etching, material changes, watermarks or electrical charging. By avoiding corrosion, etching, and altering surface charge properties, manufacturers can recover nearly all of the final yield loss associated with in-line testing. A study to evaluate cryogenic aerosol defect removal, across multiple BEOL processing steps, used 300 mm bare Si wafers in a 65nm logic production line. For all particle sizes measured, PRE with cryogenic aerosol cleaning was 99% or greater, with no material loss or substrate modification. With a PRE performance validated against defects as small as 45nm, cryogenic aerosol cleaning is found to be well-equipped to deliver 99% or better removal of the larger, probe-related defects associated with in-line electrical testing. Source


Syverson D.,FSI International
EuroAsia Semiconductor | Year: 2010

Steam injecting a sulphuric acid hydrogen peroxide (SPM) mixture minimizes material loss and ensures critical uniformity in all wet stripping of implanted photoresist (PR). When the steam is injected into the SPM solution it releases its latent heat of vaporization, permitting greater increases in temperature without excessively diluting the reactive species. Steam-injected SPM not only removes implanted photoresist, it does so very quickly. The SPM blend ratio can be adjusted to optimize the reactivity of the solution. Injecting steam has little dilution effect because of the tremendous amount of energy that is released when the steam is dissolved into the SPM mixture on the wafer's surface. The high chemical reactivity achieved by steam-injected SPM enables the stripping of photoresist by wet chemical reaction alone in most extreme implant conditions. Steam-injected SPM requires a closed chamber design to safely contain the aggressive, high-temperature cleaning chemistries. A closed chamber also provides control of both atmospheric and dissolved gases in the process environment. Source


Bau

Trademark
FSI International | Date: 2012-02-08

Typeface fonts recorded on magnetic media; data carriers in the nature of magnetic data carriers, magnetic disks, diskettes, software and electronic data carriers containing stored typographic typefaces of alphanumeric characters, printers fonts and typographical symbols; blank digital storage media for storing typographic typefaces of alphanumeric characters, printers fonts and typographical symbols.


Trademark
FSI International | Date: 2012-03-13

Typeface fonts recorded on magnetic media; data carriers in the nature of magnetic data carriers, magnetic disks, diskettes, software and electronic data carriers containing stored typographic typefaces of alphanumeric characters, printers fonts and typographical symbols; blank digital storage media for storing typographic typefaces of alphanumeric characters, printers fonts and typographical symbols.


Trademark
FSI International | Date: 2012-05-15

Typeface fonts recorded on magnetic media; data carriers in the nature of magnetic data carriers, magnetic disks, diskettes, software and electronic data carriers containing stored typographic typefaces of alphanumeric characters, printers fonts and typographical symbols; blank digital storage media for storing typographic typefaces of alphanumeric characters, printers fonts and typographical symbols.

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