Chaska, MN, United States
Chaska, MN, United States

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Butterbaugh J.W.,FSI International
Solid State Technology | Year: 2012

Yield advantages gained by leveraging the high particle removal efficiency (PRE) of cryogenic aerosol inserted in the BEOL after in-line testing, without altering substrate properties, are discussed. Unlike wet technology, dry cryogenic aerosol technology cleans substrates without concern for film etching, material changes, watermarks or electrical charging. By avoiding corrosion, etching, and altering surface charge properties, manufacturers can recover nearly all of the final yield loss associated with in-line testing. A study to evaluate cryogenic aerosol defect removal, across multiple BEOL processing steps, used 300 mm bare Si wafers in a 65nm logic production line. For all particle sizes measured, PRE with cryogenic aerosol cleaning was 99% or greater, with no material loss or substrate modification. With a PRE performance validated against defects as small as 45nm, cryogenic aerosol cleaning is found to be well-equipped to deliver 99% or better removal of the larger, probe-related defects associated with in-line electrical testing.


Patent
FSI International | Date: 2012-10-11

The present invention provides a tool for treating microelectronic workpieces with one or more treatment materials, including liquids, gases, fluidized solids, dispersions, combinations of these, and the like.


Patent
FSI International | Date: 2012-10-09

The present invention provides a tool for treating microelectronic workpieces with one or more treatment materials, including liquids, gases, fluidized solids, dispersions, combinations of these, and the like.


The present invention provides a tool for treating microelectronic workpieces with one or more treatment materials, including liquids, gases, fluidized solids, dispersions, combinations of these, and the like.


Trademark
FSI International | Date: 2012-11-27

Typeface fonts recorded on magnetic media; data carriers in the nature of magnetic data carriers, magnetic disks, diskettes, software and electronic data carriers containing stored typographic typefaces of alphanumeric characters, printers fonts and typographical symbols; blank digital storage media for storing typographic typefaces of alphanumeric characters, printers fonts and typographical symbols.


Trademark
FSI International | Date: 2012-02-15

Typeface fonts recorded on magnetic media; data carriers in the nature of magnetic data carriers, magnetic disks, diskettes, software and electronic data carriers containing stored typographic typefaces of alphanumeric characters, printers fonts and typographical symbols; blank digital storage media for storing typographic typefaces of alphanumeric characters, printers fonts and typographical symbols.


Trademark
FSI International | Date: 2012-02-15

Typeface fonts recorded on magnetic media; data carriers in the nature of magnetic data carriers, magnetic disks, diskettes, software and electronic data carriers containing stored typographic typefaces of alphanumeric characters, printers fonts and typographical symbols; blank digital storage media for storing typographic typefaces of alphanumeric characters, printers fonts and typographical symbols.


Trademark
FSI International | Date: 2012-02-15

Typeface fonts recorded on magnetic media; data carriers in the nature of magnetic data carriers, magnetic disks, diskettes, software and electronic data carriers containing stored typographic typefaces of alphanumeric characters, printers fonts and typographical symbols; blank digital storage media for storing typographic typefaces of alphanumeric characters, printers fonts and typographical symbols.


Trademark
FSI International | Date: 2012-03-13

Typeface fonts recorded on magnetic media; data carriers in the nature of magnetic data carriers, magnetic disks, diskettes, software and electronic data carriers containing stored typographic typefaces of alphanumeric characters, printers fonts and typographical symbols; blank digital storage media for storing typographic typefaces of alphanumeric characters, printers fonts and typographical symbols.


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