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Greve H.,University of Kiel | Woltermann E.,University of Kiel | Jahns R.,University of Kiel | Marauska S.,Fraunhofer Institute for Silicon Technology | And 5 more authors.
Applied Physics Letters | Year: 2010

The signal of magnetic sensors based on resonant cantilevers comprised of elastically coupled piezoelectric and magnetostrictive materials increases as the damping decreases. Here, we demonstrate that air damping which normally is suppressed by evacuation can also be substantially reduced by lowering the resonance frequency. We show that a Si-cantilever structured to include a seismic mass features a resonant magnetoelectric coupling coefficient of 1.8 kV/cmOe at 330 Hz in air. © 2010 American Institute of Physics.

Neumann G.,Fraunhofer Institute for Silicon Technology | Wursig A.,Fraunhofer Institute for Silicon Technology
Physica Status Solidi - Rapid Research Letters | Year: 2010

The Expert Opinion is written by a distinguished scientist and presents his personal view on important and relevant new results of research, highlighting their significance and putting the work into perspective for a broader audience. Please send comments to pss.rapid@wiley-vch.de or to the author. The text by G. Neumann and A. Würsig refers to the Rapid Research Letter by H. Föll et al., published in this issue of Phys. Status Solidi RRL 4, 4-6 (2010). © 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

Hofmann U.,Fraunhofer Institute for Silicon Technology | Janes J.,Fraunhofer Institute for Silicon Technology
Advanced Microsystems for Automotive Applications 2011: Smart Systems for Electric, Safe and Networked Mobility | Year: 2011

The concept and design of a low cost two-axes MEMS scanning mirror with an aperture size of 7 millimetres for a compact automotive LIDAR sensor is presented. Hermetic vacuum encapsulation and stacked vertical comb drives are the key features to enable a large tilt angle of 15 degrees. A tripod MEMS mirror design provides an advantageous ratio of mirror aperture and chip size and allows circular laser scanning. © Springer-Verlag Berlin Heidelberg 2011.

Giese T.,Fraunhofer Institute for Silicon Technology | Janes J.,Fraunhofer Institute for Silicon Technology
Proceedings of SPIE - The International Society for Optical Engineering | Year: 2015

Electrostatic driven 2D MEMS scanners resonantly oscillate in both axes leading to Lissajous trajectories of a digitally modulated laser beam reflected from the micro mirror. A solid angle of about 0.02 is scanned by a 658nm laser beam with a maximum repetition rate of 350MHz digital pulses. Reflected light is detected by an APD with a bandwidth of 80MHz. The phase difference between the scanned laser light and the light reflected from an obstacle is analyzed by sub-Nyquist sampling. The FPGA-based electronics and software for the evaluation of distance and velocity of objects within the scanning range are presented. Furthermore, the measures to optimize the Lidar accuracy of about 1mm and the dynamic range of up to 2m are examined. First measurements demonstrating the capability of the system and the evaluation algorithms are discussed. © 2015 SPIE.

Marauska S.,Fraunhofer Institute for Silicon Technology | Jahns R.,University of Kiel | Greve H.,University of Kiel | Quandt E.,University of Kiel | And 2 more authors.
Journal of Micromechanics and Microengineering | Year: 2012

For the measurement of biomagnetic signals in the pico- and femtotesla regime superconducting interference devices (SQUIDs) are commonly used. Their major limitation comes from helium cooling which makes these sensors bulky and expensive. We show that MEMS sensors based on magnetoelectric (ME) composites could be capable as a replacement for biomagnetic measurements. Using surface micromachining processes a cantilever beam with a stack composed of SiO 2/Ti/Pt/AlN/Cr/FeCoSiB was fabricated on a 150mm Si (100) wafer. First measurements of a rectangular micro cantilever with a thickness of 4νm and lateral dimensions of 0.2mm×1.12mm showed a giant ME coefficient ME= 1000 (V m 1)/(A m 1) in resonance at 2.4kHz. The resulting static ME coefficient is ME= 14 (V m 1)/(A m 1). In resonance operation a sensitivity of 780V T 1and noise levels as low as 100 pT Hz 1/2have been reached. © 2012 IOP Publishing Ltd.

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