Papaioannou G.,National and Kapodistrian University of Athens |
Giacomozzi F.,Fondazione B. Kessler FBK |
Papandreou E.,National and Kapodistrian University of Athens |
Margesin B.,Fondazione B. Kessler FBK
Applied Physics Letters | Year: 2011
The paper investigates the actuation mechanism in floating electrode microelectromechanical system capacitive switches. It is demonstrated that in the pull-in state, the device operation turns from voltage to current controlled actuation. The current arises from Poole-Frenkel mechanism in the dielectric film and Fowler-Nordheim in the bridge-floating electrode air gap. The pull-out voltage seems to arise from the abrupt decrease of Fowler-Nordheim electric field intensity. This mechanism seems to be responsible for the very small difference with respect to the pull-in voltage. © 2011 American Institute of Physics.