Eindhoven, Netherlands
Eindhoven, Netherlands

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A method for emission testing of a semiconductor device (DUT), by mounting the DUT onto an test bench of an emission tester, the emission tester having an optical detector; electrically connecting the DUT to an electrical tester; applying electrical test signals to the DUT while keeping test parameters constant; inserting an optical filters into an optical path of the emission tester and collecting emission test signal from the optical detector; removing the filter from the optical path and collecting emission test signal from the optical detector. Comparing the images obtained with and without the filter. The filter may be shortpass to obtain emission signal, a bandpass for detecting forward bias, or longpass to obtain thermal signal.


A method of investigating a specimen using a tomographic imaging apparatus using a stage for producing relative motion of a source with respect to a specimen, so as to allow the source and a detector to image the specimen along a series of different viewing axes and a processing apparatus for assembling a tomographic image of at least part of the specimen. The investigation is carried out by considering a virtual reference surface that surrounds the specimen and is substantially centered thereon, considering an incoming point of intersection of each of said viewing axes with this reference surface, thereby generating a set of such intersection points corresponding to the series of viewing axes, choosing discrete viewing axes in the series so as to cause the set to comprise a two-dimensional lattice of points located areally on the reference surface in a substantially uniform distribution.


Patent
FEI Company | Date: 2016-07-20

A method of investigating a specimen using a tomographic imaging apparatus comprising:


Patent
FEI Company | Date: 2016-07-27

A micro-chamber for inspecting a sample material immersed in a liquid and a method for filling such a chamber are described. The sample chamber includes an inspection volume for holding the sample material, the inspection volume defined by first and second rigid layers, with a hermetic seal between the layers. The inspection volume within the sample chamber is evacuated. Prior to filling the inspection volume, a thin part of at least one of the rigid layers separates the inspection volume from the outside, the thin part being equipped to be punctured. The liquid with immersed sample material is placed upon the thin part and the thin part is then punctured, resulting in sample material entering the inspection volume.


A method for investigating a specimen using a tomographic imaging apparatus, comprising acquiring a set of input images of the specimen taken at a corresponding set of source positions that are intended to lie on an ideal locus but are instead caused by positioning errors to lie on a distorted locus, using the images to construct an initial tomographic image, dissociating the initial tomographic image into a set of reference images referenced to said ideal locus, comparing the given input images to the corresponding reference images, calculating a set of transformations necessary to map the input images onto the reference images, and using the set of transformations to construct a modified tomographic image.


Patent
FEI Company | Date: 2017-02-22

A method of investigating a specimen (S) using a tomographic imaging apparatus comprising:- A specimen holder, for holding the specimen;- A source (Sx), for producing a beam (B) of radiation that can be directed at the specimen (S);- A detector (D), for detecting a flux of radiation transmitted through the specimen (S) from the source (Sx);- A stage apparatus (A), for producing relative motion of the source (Sx) with respect to the specimen (S), so as to allow the source (Sx) and detector (D) to image the specimen (S) along a series of different viewing axes (V_(i));- A processing apparatus, for performing a mathematical reconstruction step whereby output from the detector is compiled into a tomographic image of at least part of the specimen (S),wherein said reconstruction step is performed in multiple iterations, which comprise the following steps:(i) Using a Back Projection technique to produce an initial tomogram from a set of initial images;(ii) Subjecting said initial tomogram to a mathematical filtering operation, thereby producing an adjusted tomogram;(iii) Using a Forward Projection technique on said adjusted tomogram to dissociate it into a set of calculated images;(iv) Repeating steps (i)-(iii) until said calculated images satisfy an acceptance criterion. It is also provided a scanning electron microscope (1) including an in-situ computerised tomography (CT) module (7) for performing CT inspection in-situ inside the chamber of the microscope (1).


A method and apparatus for directing light or gas or both to a specimen positioned within about 2 mm from the lower end of a charged particle beam column. The charged particle beam column assembly includes a platform defining a specimen holding position and has a set of electrostatic lenses each including a set of electrodes. The assembly includes a final electrostatic lens that includes a final electrode that is closest to the specimen holding position. This final electrode defines at least one internal passageway having a terminus that is proximal to and directed toward the specimen holding position.


A method of examining a specimen in a Charged Particle Microscope, comprising the following steps:- Providing a specimen on a specimen holder;- Heating the specimen to a temperature of at least 250C;- Directing a beam of charged particles from a source through an illuminator so as to irradiate the specimen;- Using a detector to detect a flux of electrons emanating from the specimen in response to said irradiation,wherein said detector comprises:- A scintillator module, which produces photons in response to impingement by electrons in said flux;- A photon sensor, for sensing said photons,and is configured to:- Preferentially register a first category of photons, associated with impingement of electrons on said scintillator module;- Selectively suppress a second category of photons, comprising thermal radiation from the heated specimen.


Patent
FEI Company | Date: 2017-04-05

Methods, apparatuses, and systems for slice and view processing of samples with dual beam systems. The slice and view processing includes exposing a vertical wall of a trench formed in a sample surface; capturing a first image of the wall by interrogating the wall with an interrogating beam while the wall is at a first orientation relative to the beam; capturing a second image of the wall by interrogating the wall with the beam while the wall is at a second orientation relative to the beam, wherein first distances in the first image between a reference point and surface points on the wall are different than second distances in the second image between the reference point and the surface points; determining elevations of the surface points using the first distances and the second distances; and fitting a curve to topography of the wall using the elevations.


Although available since the early days of electron microscopy, recent technology developments of the environmental transmission electron microscope (ETEM) have enabled new research in the study of nanomaterials in gaseous environments. Significant improvements in scanning/transmission electron microscope (S/TEM) technologies, while containing a gaseous environment close to the object under investigation, enable now the atomic scale study of phenomena occurring during gas-solid interactions. A focus behind these developments is the research on nanomaterial-based technologies, for instance for efficient energy conversion, use and storage as well as for environmental protection. In situ high spatial resolution characterization provides unique information that is beneficial for understanding the relationship between the structure, properties and function of nanostructures directly on their characteristic length scales. The progress in recent research is reviewed to highlight the potential of the state-of-the-art differentially-pumped microscope platform, based on the latest microscope generation optimized for atomic scale in situ investigations. Using cases from current catalysis research, high resolution imaging reveals structural changes in nanocatalysts when being active and is instrumental in understanding deactivation processes; while spectroscopy gives additional access to reactivity. Also, imaging schemes are discussed that focus on enhancing the achievable imaging resolution, while having the effect of electron beam-solid interaction in the nanomaterial under control. © 2014 The Royal Society of Chemistry.

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