Ev Group E Thallner Gmbh | Date: 2017-03-08
The present invention relates to a method for evening out the thickness variation of a substrate stack (1) by locally impacting local thickness maxima (12) by means of at least one impacting apparatus (11, 11, 11) that has at least one impacting unit (9, 9, 9, 9, 9IV, 9V, 9VI), said substrate stack consisting of a product substrate (4) and a carrier substrate (2) and said substrates being particularly connected by means of a connecting layer (3). The invention further relates to a corresponding device.
Ev Group E Thallner Gmbh | Date: 2017-03-01
The present invention relates to a method for embossing a nanostructure (13) from a nanostructure stamp (5) into a stamp face (14) of a curable material (8) applied on a substrate (7) with the following steps, in particular in the following sequence: aligning the nanostructure (13) with respect to the stamp face (14), embossing the stamp face (14) by A) preloading the nanostructure stamp (5) by deforming the nanostructure stamp (5) and/or preloading the substrate (7) by deforming the substrate (7), B) contacting a partial area (15) of the stamp face (14) with the nanostructure stamp (5), and C) automatic contacting of the remaining area (16) at least partially, in particular predominantly, by the preloading of the nanostructure stamp (5) and/or the preloading of the substrate (7).
Ev Group E Thallner Gmbh | Date: 2017-02-01
The invention relates to a method for temporarily coating cavities (2), with which a semiconductor substrate (1) is at least partially interspersed and which are intended for a permanent coating and/or component mounting, with a temporarily applied coating material (3) before processing steps for processing at least one surface (1o) of the semiconductor substrate (1). The invention further relates to a method for removing a temporary coating from cavities (2) of a semiconductor substrate (1), wherein the coating has been or is applied according to an aforementioned method and wherein thereafter, in particular immediately thereafter, a permanent coating and/or component mounting of the cavities (2) occurs.
Ev Group E Thallner Gmbh | Date: 2017-03-15
The invention relates to a device for supplying at least one substrate (7) with a plasma, said device comprising a first electrode (1) and a second electrode (12) which can be disposed opposite the first electrode, said electrodes being designed jointly to generate the plasma between the electrodes (1, 12), characterised in that at least one of the electrodes (1, 12) is formed by at least two electrode units (2, 3). The invention further relates to a corresponding method.
Agency: European Commission | Branch: H2020 | Program: RIA | Phase: ICT-26-2014 | Award Amount: 3.23M | Year: 2015
The SAPHELY project focuses on the development and the preclinical validation of a nanophotonic-based handheld point-of-care (POC) analysis device for its application to the minimally-invasive early diagnosis of diseases, with a focus in cancer. Disease identification will be based in the fast (<5 minutes), ultra-sensitive (sub-pM) and label-free detection of novel highly-specific microRNA (miRNA) biomarkers, using a small volume of whole blood (<100 L). This POC analysis device, which will have a low cost (envisaged cost < 3000), will significantly help in the implementation of mass screening programs, with the consequent impact on clinical management, reducing also costs of treatments, and increasing survival rates. The ultra-high sensitivity required for the direct detection of miRNA biomarkers present in the bloodstream will be achieved by using a novel sensing amplification technique. This technique is based in the use of molecular beacon capture probes with an attached high index nanoparticle, so that the hybridization events are translated into the displacement of these nanoparticles from the sensor surface. The use of this self-amplification technique avoids the use of complex PCR-based amplification methods or labelling processes, which are difficult to implement on-chip. The cost, size and weight reduction required for deploying an affordable handheld POC device will be achieved by using a novel power-based readout scheme for photonic bandgap sensing structures where the use of expensive, bulky and heavy tuneable lasers and spectrometers is avoided. Special attention will be paid within the SAPHELY project to explore the potential deployment and commercialisation of the analysis device, by means of the involvement of relevant academic and industrial partners, as well as end users.
Agency: European Commission | Branch: H2020 | Program: RIA | Phase: PHC-10-2014 | Award Amount: 4.15M | Year: 2015
The PHOCNOSIS project aims at the development and the preclinical validation of a nanotechnology-based handheld point-of-care testing (POCT) analysis device for its application in the early diagnosis of cardiovascular diseases (CVD). The diagnosis will be carried out by means of the fast (<10 minutes), ultra-sensitive (<1 ng/L) and label-free detection of multiple cardiac biomarkers, using a small volume of whole blood (<100 L). This POCT analysis device will significantly help in the implementation of mass screening programs, with the consequent impact on clinical management, reducing also costs of treatments, and increasing survival rates. The PHOCNOSIS analysis device will be based on two state-of-the-art technological elements in order to obtain a compact and highly sensitive final device. First, an integrated micro-/nanofluidic system will be used for biomarkers separation, purification and concentration, targeting an effective concentration increase by a factor greater than 1000x for the targeted biomarkers. Then, the concentrated biomarkers will be detected using a novel nanophotonic-based sensing technique, envisaging a final combined detection limit below 1 ng/L. This novel sensing technique allows us to obtain systems which are low-cost, compact and with a lower complexity, thus making them suitable for the development of portable devices for POCT. The PHOCNOSIS project will target the deployment of disposable biochips with an envisaged cost below 3 to be used in a handheld analysis device with an envisaged cost below 3000. Special attention will be paid within the PHOCNOSIS project to explore the potential deployment and commercialisation of the analysis device, by means of the involvement of relevant academic and industrial partners, as well as end users.
Agency: European Commission | Branch: H2020 | Program: ECSEL-IA | Phase: ECSEL-02-2014 | Award Amount: 139.30M | Year: 2015
The proposed pilot line project WAYTOGO FAST objective is to leverage Europe leadership in Fully Depleted Silicon on Insulator technology (FDSOI) so as to compete in leading edge technology at node 14nm and beyond preparing as well the following node transistor architecture. Europe is at the root of this breakthrough technology in More Moore law. The project aims at establishing a distributed pilot line between 2 companies: - Soitec for the fabrication of advanced engineered substrates (UTBB: Ultra Thin Body and BOx (buried oxide)) without and with strained silicon top film. - STMicroelectronics for the development and industrialization of state of the art FDSOI technology platform at 14nm and beyond with an industry competitive Power-Performance-Area-Cost (PPAC) trade-off. The project represents the first phase of a 2 phase program aiming at establishing a 10nm FDSOI technology for 2018-19. A strong added value network is created across this project to enhance a competitive European value chain on a European breakthrough and prepare next big wave of electronic devices. The consortium gathers a large group of partners: academics/institutes, equipment and substrate providers, semiconductor companies, a foundry, EDA providers, IP providers, fabless design houses, and a system manufacturer. E&M will contribute to the objective of installing a pilot line capable of manufacturing both advanced SOI substrates and FDSOI CMOS integrated circuits at 14nm and beyond. Design houses and electronics system manufacturer will provide demonstrator and enabling IP, to spread the FDSOI technology and establish it as a standard in term of leading edge energy efficient CMOS technology for a wide range of applications battery operated (consumer , healthcare, Internet of things) or not. Close collaboration between the design activities and the technology definition will tailor the PPAC trade-off of the next generation of technology to the applications needs.
Ev Group E Thallner Gmbh | Date: 2016-07-12
A process for the production of a permanent, electrically conductive connection between a first metal surface of a first substrate and a second metal surface of a second substrate, wherein a permanent, electrically conductive connection is produced, at least primarily, by substitution diffusion between metal ions and/or metal atoms of the two metal surfaces.
Ev Group E Thallner Gmbh | Date: 2016-06-28
Device and method for alignment of a first contact surface of a first substrate with a second contact surface of a second substrate which can be held on a second platform. The device includes first X-Y positions of first alignment keys located along the first contact surface, and second X-Y positions of second alignment keys which correspond to the first alignment keys and which are located along the second contact surface, wherein the first contact surface can be aligned based on the first X-Y positions in the first alignment position and the second contact surface can be aligned based on the second X-Y positions in the second alignment position.
Agency: European Commission | Branch: H2020 | Program: IA | Phase: NMP-04-2014 | Award Amount: 7.93M | Year: 2015
Roll-to-roll (R2R) technologies are mature core processes in manufacturing lines for graphical printing industry. In several other areas (e.g. electronics or optics) R2R techniques are emerging, being expected to notably lower the unit prices of flexible devices. In particular, recently developed roller-based nanoimprinting methods enable unrivalled throughput and productivity for precise fabrication of micro- and nanoscale patterns. Areas that will benefit strongly from adopting such R2R nanoimprinting technologies are microfluidics and lab-on-chip products for diagnostics, drug discovery and food control. Such devices require combined printing of micro- and nanostructures and large quantities at low unit costs. The project R2R Biofluidics aims on the development of a complete process chain for first-time realization of production lines for two selected bioanalytical lab-on-chip devices based on high-throughput R2R nanoimprinting in combination with complementary printing and manufacturing technologies. Two types of demonstrators will be fabricated targeting application areas, which would clearly benefit from technology advancement in high volume manufacturing, show large potential for commercial exploitation and adopt current standard formats (microtiter plate and microscope slides). Demonstrator 1 will represent an in-vitro diagnostic (IVD) chip suitable for point-of-care applications, showing improved sensitivity thanks to imprinted nanoscale optical structures and microfluidic channels. R2R fabrication will further greatly reduce production costs and increase manufacturing capacity with respect to currently used products. Demonstrator 2 will provide a device for improved neuron based high-throughput screening assays in drug development. It will consist of nano to microstructured, interconnected channels in combination with dedicated biofunctionalized surfaces for alignment and controlled growth of neurons.