ENSMM - National Engineering Institute in Mechanics and Microtechnologies

www.ens2m.fr
Besancon, France

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Grant
Agency: European Commission | Branch: FP7 | Program: JTI-CP-FCH | Phase: SP1-JTI-FCH.2012.3.3 | Award Amount: 3.27M | Year: 2013

The SAPPHIRE project will develop an integrated prognostics and health management system (PHM) including a health-adaptive controller to extend the lifetime and increase the reliability of heat and power-producing systems based on low-temperature proton-exchange membrane fuel cells (LT-PEMFC). The PHM system can actively track the current health and degradation state of the fuel-cell system, and through the health-adaptive control counteract the degradation of cells and balance of plant, and thereby boost the lifetime of the controlled system beyond the current lifetime expectancy. An important part of project is to develop novel prognostics approaches implemented in the PHM for estimation of the remaining useful life (RUL) of the PEMFC. An efficient sensor configuration for control will be chosen using controllability analysis methods, also including indirect sensing/estimation techniques to replace expensive measurement principles. Based on sensor inputs and input from the control system, the PHM algorithms identify the probable failure modes trajectories and estimate the remaining useful life. The consortiums competence ranges from first principles estimation, to signal processing, regression and data-driven techniques, such as neural networks. This ensures an efficient choice of methods. The project covers a full cycle of research activities, from requirement specification and laboratory experiments, through study of degradation phenomena and selection of prognostic methods, to synthesis of the control system and its testing on the target PEMFC system. A technical-economical analysis will be performed in order to assess the impact of the developed tool in terms of lifetime improvement. The project is expected to produce hardware and software solutions and have a significant scientific output. The implemented solutions resulting from the project will be tested and validated by the research and industrial partners.


Grant
Agency: European Commission | Branch: FP7 | Program: CP-IP | Phase: NMP.2013.1.4-2 | Award Amount: 12.85M | Year: 2013

The thermal properties of nanostructured materials are of fundamental importance to modern technology, but at present reproducible metrological definitions, tools and methods do not exist. This is because the mechanisms of heat transport at the nanoscale are entirely different to those at the macro scale. The project will place nanothermal metrology on a solid basis by an integrated physics-based experimental and modelling effort to: Define a common terminology for nanothermal measurement Realise standard materials and devices for measurement and calibration of nanothermal measurements Develop new instruments and methods for traceable nanothermal measurement Develop calibrated and validated thermal models covering the range from atomic to macro-scale Apply these tools to selected representative industrial problems Assess the tools for suitability for adoption as potential standards of measurement including their traceability and reproducibility The objectives will be achieved by a team comprising physicists, materials scientists, modellers, instrumentalists, microscopists, industrial partners (including SMEs and OEMs) and National Measurement Institutes. The outputs of QUANTIHEAT will be embodied in highly characterised reference samples, calibration systems, measurement tools, numerical modelling tools, reference measurements and documented procedures. The availability of calibrated numerical modelling tools will facilitate the rapid digital thermal design of new nanosystems without the need for extensive prototyping. Their validation against experiment over all length scales will provide a solid basis for the deployment of new nanostructured materials, devices and structures having optimised performance without the need for excessively conservative design. Standardization is a key driver of industrial and scientific progress: QUANTIHEAT is expected to constitute a de-facto standard for a key area of physical measurement at the nanoscale worldwide.


Patent
French National Center for Scientific Research, ENSMM - National Engineering Institute in Mechanics and Microtechnologies | Date: 2015-10-21

It is proposed a differential temperature sensor (100) comprising:- a first piezoelectric substrate (10) made of a single crystal of lanthanum gallium silicate on which is arranged a first surface transverse wave resonator (11) having a first predetermined resonance configuration,- a second piezoelectric substrate (20) made of a single crystal of lanthanum gallium silicate on which is arranged a second surface transverse wave resonator (21) having a second predetermined resonance configuration identical to the first predetermined resonance configuration,the first piezoelectric substrate having a double-rotation cut which is different from the double-rotation cut angle of said second piezoelectric substrate.


Patent
French National Center for Scientific Research, ENSMM - National Engineering Institute in Mechanics and Microtechnologies | Date: 2015-07-28

This sensor, comprises: a first surface acoustic wave device, comprising a first piezoelectric substrate, formed from a (YXw/t)/// cut of a Langasite crystal, where is equal to 05 is equal to 5520 and is equal to 32.57.5 and a first resonator having a first transducer laying on a first propagation surface and having two sets of interdigitated first electrodes formed from an electrically conductive material having a high melting temperature; and a second surface acoustic wave device, comprising a second piezoelectric substrate, formed from a (YXw/t)/// cut of a Langasite crystal, where is equal to 05, is equal to 520 and is equal to 07.5, and a second resonator having a second transducer laying on a second propagation surface and having two sets of interdigitated second electrodes formed from an electrically conductive material having a high melting temperature; said first and second surface acoustic wave devices being independent one from the other in terms of surface acoustic wave propagation.


Patent
French National Center for Scientific Research, ENSMM - National Engineering Institute in Mechanics, Microtechnologies and Besancon University Hospital Center | Date: 2012-01-31

The invention relates to a microrobot that is microfabricated using micro-electromechanical system technology, including i pairs of drive modules wherein i ranges from 1 to n, where n is no less than 1, the microrobot comprising: a mounting arranged so as to support at least two drive modules aligned in a first direction (x), said drive modules forming a pair of drive modules; i pairs of primary connecting-rod assemblies, each primary connecting-rod assembly being pivotably connected to the drive pin of a drive module of the i^(th )pair of drive modules; a pair of secondary connecting-rod assemblies, each secondary connecting-rod assembly being pivotably connected to the primary connecting-rod assembly of the n^(th )pair of drive modules and to the mounting; and an actuating member pivotably connected to each secondary connecting-rod assembly.


Grant
Agency: European Commission | Branch: FP7 | Program: CP | Phase: ICT-2011.2.1 | Award Amount: 3.56M | Year: 2012

Lasers form an increasingly common tool for precision treatment of pathological conditions on delicate and vital human organs. Laser phonomicrosurgery, which is a suite of complex otolaryngological surgical techniques for the treatment of minute abnormalities in the larynx, is one such example. However, laser aiming control for this procedure relies completely on the dexterity of surgeons, who must operate through a microscope and deal with its associated poor ergonomics, and this can have a strong impact on the quality of the procedures. In addition, the laser beam is directed from a comparatively large range (400mm), resulting in accuracy and consistency problems, and requiring extensive surgeon training. In this multidisciplinary project a redesign of this surgical setup is proposed to create an advanced augmented micro-surgical system through research and development of real-time cancer tissue imaging, surgeon-machine interfaces, assistive teleoperation, intelligent (cognitive) safety systems, and augmented-reality. Furthermore, research and development of new endoscopic tools and precision micro-robotic end effectors will allow relocating the laser actuator closer to the surgical site. This will allow unprecedented levels of accessibility and precision, while the surgeon will operate in a more ergonomic, information-rich, and assistive environment. The outcomes of the project will be improved quality, safety, and effectiveness in laser phonomicrosurgery, enabling total tumour removal with minimal damage to healthy tissue. The research efforts herein will generate new knowledge in the design and control of medical micro-mechatronic devices; cancer tissue imaging; assistive teleoperation in medicine; physician-robot interfaces; and cognitive computer vision. These technological advances will pave the way towards new and safer minimally invasive laser microsurgeries, leading to a significantly enhanced capacity for cancer treatment in general.


Grant
Agency: European Commission | Branch: FP7 | Program: CP | Phase: ICT-2007.3.6 | Award Amount: 3.78M | Year: 2008

SMARTIEHS develops a smart, high-speed, cost effective and flexible inspection system for production of Micro(Opto)ElectroMechanicalSystems (M(O)EMS). SMARTIEHS decreases the inspection time of a wafer by a factor of 100. It cuts production costs and shorten the time to market.\nTo achieve this, SMARTIEHS develops an innovative measurement concept: a probing wafer consisting of an array of micro optical sensors is adapted to and aligned with the wafer under test. The design and production of the micro-optical interferometer array inspects 100 M(O)EMS structures within only one measurement cycle. A multifunctional approach of the measurement concept allows the inspection of passive and active parameters within one inspection system. A novel smart pixel detector array is developed.\nSMARTIEHS provides a multifunctional design with two interferometer configurations; a low coherent interferometer and a laser interferometer. The project focuses on the measurement of shape and deformation, resonance frequency and vibration amplitude distribution.\nThe SMARTIEHS technology will be validated and demonstrated with industrial end users.\nThe work in SMARTIEHS will be organised in eight work packages: Project management, Inspection system design, Micro-optical interferometer system design, Micro-optical wafer production, Smart pixel camera development, inspection system integration, Inspection system test and validation, Exploitation and dissemination.\nThe SMARTIEHS consortium has RTD partners and industrial users: SINTEF (low-coherence interferometry, micro optics), WUT (laser interferometry, micro optics), Fraunhofer (production of Diffractive Optical Elements), CNRS (production of refractive optics, micro lenses), CSEM (design and production of smart pixel detector arrays), Heliotis (exploitation), IMMS (macro design of the inspection system), and Techfab (end user and validation).\nSMARTIEHS lasts 38 months and has a budget of 3,77M. Requested EC contribution is 2,85 M


Grant
Agency: European Commission | Branch: FP7 | Program: CP | Phase: ICT-2007.3.6 | Award Amount: 4.85M | Year: 2008

Atomic clocks provide enhanced accuracy, stability, and timing precision compared to quartz-based technologies. However, the size and power consumption of existing atomic clocks far exceeds that those of quartz-based clocks, not preventing their deployment in portable applications.\nThe goal of the MAC-TFC proposal is to develop and demonstrate all the necessary technology to achieve an ultra-miniaturised, low-power an ultra-miniaturised caesium atomic clock, presenting a short-term stability of 5x10-11 over 1 hour while operating on the power of an AA battery, with less than 200 mW power consumption.\nPhased technology development approaches are planned. The first phase focuses on establishing theoretical limits of MEMS atomic clocks and demonstrating practical design and fabrication feasibilities, optimizing the performances of atomic resonator. Then, the second phase of proposal aims at demonstrating and developing the technologies of the building blocks for the miniaturized clock including a fully customised semiconductor laser, an innovative approach of filing the clock cell with alkali vapour and a low-power ASIC for the analog Radio Frequency (RF) electronics. The third phase is concentrated on the final chip-level integration and package of two alternative prototypes of MEMS atomic clock using LTCC technology. The physics package includes a micromachined cell with well controlled alkali vapour, a semiconductor laser , collimatting/polarizing microoptical elements and a photodetector. Finally, a fourth phase is devoted to the testing the final assembly of the physics package together with the developed electronics, as well as setting the basis for technology transfer and pre-industrialisation for potential applications.\nTo this aim, MAC-TFC brings together a consortium made of 4 major academic institutions (UFC, UniNE, WUT, UUlm), 2 research institutes ( VTT, CEA) and 3 industrial partners, SAES, ASU, OSA.


Patent
French National Center for Scientific Research, ENSMM - National Engineering Institute in Mechanics and Microtechnologies | Date: 2016-02-03

This sensor, comprises: a first surface acoustic wave device, comprising a first piezoelectric substrate, formed from a (YXwlt)/// cut of a Langasite crystal, where is equal to 0 5 , is equal to 55 20 and is equal to 32.5 7.5 and a first resonator having a first transducer laying on a first propagation surface and having two sets of interdigitated first electrodes formed from an electrically conductive material having a high melting temperature; and a second surface acoustic wave device, comprising a second piezoelectric substrate, formed from a (YXwlt)/// cut of a Langasite crystal, where is equal to 0 5 , is equal to 5 20 and is equal to 0 7.5, and a second resonator having a second transducer laying on a second propagation surface and having two sets of interdigitated second electrodes formed from an electrically conductive material having a high melting temperature; said first and second surface acoustic wave devices being independent one from the other in terms of surface acoustic wave propagation.


Patent
University of Franche Comte, ENSMM - National Engineering Institute in Mechanics and Microtechnologies | Date: 2013-03-22

A micropositioning device for a piezoelectric actuator includes a means for controlling an electric field applied to the piezoelectric actuator so as to deform the piezoelectric material, and means for simultaneous measurement of a variation of electric charge accumulated on the piezoelectric actuator resulting from the deformation; and means for acquiring measurements of the variation of electric charge, for processing these acquisitions and for estimating a displacement (x, y, z) of the piezoelectric actuator and/or an applied force.

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