Donbass State Academy of Mechanical Engineering

Kramators’k, Ukraine

Donbass State Academy of Mechanical Engineering

Kramators’k, Ukraine
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Agulov A.V.,Donbass State Academy of Mechanical Engineering | Goncharov A.A.,Donbass State Academy of Mechanical Engineering | Stupak V.A.,Donetsk National University | Petukhov V.V.,Donbass State Academy of Mechanical Engineering
Inorganic Materials | Year: 2014

The thermal stability of the composition and crystal structure of hafnium diboride films grown by rf magnetron sputtering have been studied by X-ray diffraction and secondary ion mass spectrometry. We have assessed the effect of high-temperature annealing in air on the phase composition and structure of the hafnium diboride films. The results demonstrate that annealing produces a HfO2 oxide layer on the surface of the HfB2 film. Raising the annealing temperature from 600 to 1000°C leads to an increase in the thickness of the oxide layer from 100 to 600 nm and to the formation of a multilayer HfB2-HfO2 coating. © 2014 Pleiades Publishing, Ltd.


Goncharov A.A.,Donbass State Academy of Mechanical Engineering | Agulov A.V.,Donbass State Academy of Mechanical Engineering | Stupak V.A.,Donetsk National University | Petukhov V.V.,Donbass State Academy of Mechanical Engineering
Inorganic Materials | Year: 2011

The structure and composition of hafnium diboride films grown by rf magnetron sputtering have been studied by X-ray diffraction and secondary ion mass spectrometry. The results demonstrate that the key parameters of the process are the bias-dependent energy of incident particles and the substrate temperature. The substrate microstructure may also have a significant effect on the film growth process, when the first two factors are negligible. We have examined the microstructure effect on the elemental composition of the films. The secondary ion emission coefficient for boron in highly textured films is shown to be 20-25% above that in the powder target. At the same time, clustered amorphous films have a reduced boron content: B/Hf < 2. © 2011 Pleiades Publishing, Ltd.

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