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Li J.,Northeastern University China | Li H.,Northeastern University China | Chen J.,Darly Photonics Composite Materials Shanghai Corporation | Yang Y.,Darly Photonics Composite Materials Shanghai Corporation
Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | Year: 2014

The jet flow atomization in vacuum spray was modeled, approximated, and simulated with software packages Gambit and Fluent. The influence of the nozzle structure on the vacuum spray conditions, including the dynamic pressure conversion, jet-spray velocity, and turbulent kinetic energy at the nozzle outlet were evaluated. The simulated results show that the conical nozzle has a high conversion efficiency of dynamic pressure. The fan-shaped and conical nozzle is favorable for large-area film deposition, owing to their large spray beam width. The cavitation, asso ciated with the fan-shaped nozzle and a large turbulent kinetic energy, promotes the primary breakup atomization of the droplets. We found that the fan-shaped and straight conical nozzles have a larger spray angle and smaller discharge coefficient. The strengths and weaknesses of the cylindrical and hybrid-shaped nozzles were also tentatively discussed.


Bian Y.,Shanghai University | Liu M.,Shanghai University | Ke G.,Shanghai University | Chen Y.,Shanghai University | And 3 more authors.
Surface and Coatings Technology | Year: 2015

Aluminum nitride (AlN) thin film, due to its electrical and thermal properties, can be used as thermal interface material for flexible electronics. The relationship between thermal conductivity and microstructure of aluminum nitride film was studied on films grown on glass by DC magnetron reactive sputtering at room temperature. The crystal orientation, deposition rate and grain size of AlN films were affected by the deposition power. The crystallization quality and the effective thermal conductivity of the AlN films were strongly dependent on the film thickness at the optimum power of 600. W. The bulk thermal conductivity of AlN films was found to be 15.4. W/(m·K) in this study. © 2014 Elsevier B.V.

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