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Kongens Lyngby, Denmark

Madsen M.H.,Danish Fundamental Metrologi A S | Dirscherl K.,Danish Fundamental Metrologi A S | Feidenhans'l N.A.,Danish Fundamental Metrologi A S | Feidenhans'l N.A.,Technical University of Denmark | And 2 more authors.
Proceedings of the 15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015 | Year: 2015

Polymers such as polydimethylsiloxane (PDMS) are widely used materials for replication of micro- and nanotextured surfaces and for fabrication of microfluidic devices. For metrological measurements using a replication technique one has to take the shrinkage into account. Here we report a study of the shrinkage of typical polymers for replication at the common used curing temperatures. The shrinkage factor, with its associated uncertainty, for PDMS in the range 40 °C to 120 °C is provided. By applying this correction factor, it is possible to replicate structures with an expanded standard uncertainty (k=2) of less than 0.4 % in lateral dimensions. It is also shown that fast curing polymers, such as the RepliSet-F5, have a negligible shrinkage at room temperature. Source


Madsen M.H.,Danish Fundamental Metrologi A S | Feidenhans'l N.A.,Danish Fundamental Metrologi A S | Feidenhans'l N.A.,Technical University of Denmark | Hansen P.-E.,Danish Fundamental Metrologi A S | And 2 more authors.
Journal of Micromechanics and Microengineering | Year: 2014

Polydimethylsiloxane (PDMS) is a widely used material for fabrication of microfluidic devices and for replication of micro- and nanotextured surfaces. Shrinkage of PDMS in the fabrication process can lead to leaking devices and poor alignment of layers. However, corrections to the mold master are seldom applied to counteract the shrinkage of PDMS. Also, to perform metrological measurements using replica techniques one has to take the shrinkage into account. Thus we report a study of the shrinkage of PDMS with several different mixing ratios and curing temperatures. The shrinkage factor, with its associated uncertainty, for PDMS in the range 40 to 120°C is provided. By applying this correction factor, it is possible to replicate structures with a standard uncertainty of less than 0.2% in lateral dimensions using typical curing temperatures and PDMS mixing ratios in the range 1:6 to 1:20 (agent:base). © 2014 IOP Publishing Ltd. Source

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