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Osaka, Japan

Daihen Corporation | Date: 2015-05-08

An impedance adjustment apparatus of the invention performs impedance matching using characteristic parameters, even where a high frequency power source of variable frequencies is used. The apparatus is applicable to a power supply system using a high frequency power source of variable frequencies. Characteristic parameters obtained by targeting a portion of combinations of position information (C) of a variable capacitor and output frequency information (F) of the power source are stored in a memory. A T-parameter acquisition unit acquires characteristic parameters corresponding to (C

Daihen Corporation | Date: 2015-03-04

An image inspection apparatus is provided with an image sensing unit, a determination unit, and a reference image generation unit. The image sensing unit captures an inspection target. The determination unit takes a difference between a reference image that includes a solid image of the inspection target and a captured image that is captured of the inspection target. The determination unit thereby extracts an image that is not included in an image of the inspection target in the reference image, and determines the quality of the inspection target based on the extracted image. The reference image generation unit generates the reference image that is used by the determination unit by performing predetermined image processing to change to an image showing the inspection target that is included in the captured image into a solid image.

Daihen Corporation | Date: 2015-01-22

A wire feeding mechanism includes feeding rollers and a cushioning mechanism. The feeding rollers feed a wire, which is drawn from a wire supply source, along a predetermined feed path. The cushioning mechanism is arranged between the wire supply source and the feeding rollers. The wire has an intermediate portion that extends from the wire supply source to the feeding rollers. The cushioning mechanism applies tension to the intermediate portion while the length of the intermediate portion is changing.

A substrate damage detection device is configured to be mounted to a substrate transfer robot provided with a slidably-movable substrate support. The substrate damage detection device includes an image obtainer and a damage detector. The image obtainer, such as a camera, is configured to obtain an image of the periphery of a substrate placed on the substrate support of the transfer robot. The damage detector is configured to detect damage made to the substrate by using the image of the periphery obtained by the image obtainer.

Daihen Corporation | Date: 2016-01-07

There is provided a carrier device that has a linkage arm mechanism, in particular, a carrier device that cools the linkage arm mechanism and can reduce the impact of radiation heat from a work that is in a high temperature state. A carrier device is a carrier device that includes a linkage arm mechanism and a pivot shaft, and the linkage arm mechanism includes lower arms and upper arms, and one ends of which are respectively connected to the lower arms, and horizontal movement members that support a work that is connected to the other ends of the upper arms, and cooling plates are respectively arranged between the upper arms, and the horizontal movement members.

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